X0202 4 2006-11-09 0 0001094392 RUDOLPH TECHNOLOGIES INC RTEC 0001199621 WRIGHT MICHAEL WILLIAM C/O RUDOLPH TECHNOLOGIES, INC. ONE RUDOLPH ROAD, PO BOX 1000 FLANDERS NJ 07836 1 0 0 0 Common Stock 2006-11-09 4 M 0 5337 12.16 A 19731 D Non-Qualified Stock Option (right to buy) 12.16 2006-11-09 4 M 0 5337 0 D 2007-03-10 Common Stock 5337 0 D Pursuant to a merger agreement by and among the August Technology Corporation ("August"), Rudolph Technologies, Inc. ("Rudolph") and NS Merger Sub, Inc., a wholly-owned subsidiary of Rudolph (the "Merger"), the option to purchase 7,000 shares of August common stock for $9.27 per share, initially granted by August on March 10, 2000, which was fully vested, was assumed by Rudolph in the Merger and replaced with the referenced fully vested option. /s/ Michael W. Wright 2006-11-13