X0202 4 2006-05-23 0 0001094392 RUDOLPH TECHNOLOGIES INC RTEC 0001199621 WRIGHT MICHAEL WILLIAM C/O RUDOLPH TECHNOLOGIES, INC. ONE RUDOLPH ROAD, PO BOX 1000 FLANDERS NJ 07836 1 0 0 0 Common Stock - Restricted Stock Unit 2006-05-23 4 A 0 5000 0 A 5000 D Each Restricted Stock Unit represents a contingent right to receive one (1) share of RTEC Common Stock. 100% of the shares of Common Stock subject to the Restricted Stock Unit vest two (2) years from the grant date. Generally, vested shares will be delivered to the reporting person as soon as practicable after vesting. /s/ Michael Wright 2006-09-26