X0202 4 2002-01-08 0 0001094392 RUDOLPH TECHNOLOGIES INC RTEC 0001199621 WRIGHT MICHAEL WILLIAM C/O RUDOLPH TECHNOLOGIES, INC. ONE RUDOLPH ROAD, PO BOX 1000 FLANDERS NJ 07836 1 0 0 0 Common Stock 2006-02-15 4 A 0 0 0 A 0 D Non-Qualified Stock Option (right to buy) 12.16 2006-02-15 4 A 0 5337 0 A 2007-03-10 Common Stock 5337 5337 D Non-Qualified Stock Option (right to buy) 13.12 2002-01-08 4 A 0 5718 0 A 2009-01-08 Common Stock 5718 5718 D Non-Qualified Stock Option (right to buy) 14.81 2006-01-25 4 A 0 4956 0 A 2016-01-25 Common Stock 4956 4956 D Non-Qualified Stock Option (right to buy) 17.55 2006-02-15 4 A 0 5718 0 A 2008-01-05 Common Stock 5718 5718 D Non-Qualified Stock Option (right to buy) 18.68 2002-04-05 4 A 0 160 0 A 2009-04-05 Common Stock 160 160 D Non-Qualified Stock Option (right to buy) 29.71 2004-01-08 4 A 0 4519 0 A 2011-01-08 Common Stock 4519 4519 D Mr. Wright was the holder of 22.888 shares of August Technology Corporation common stock. In the merger (the "Merger") of August Technology Corporation with and into NS Merger Sub, Inc. ("Merger Sub"), a wholly owned subsidiary of Rudolph Technologies, Inc. ("Rudolph"), each share of August Technology Corporation common stock was canceled and will be converted into the right to receive either $10.50 in cash or 0.7625 of a share of common stock, par value $0.001 per share, of Rudolph common stock, or a combination of cash and Rudolph common stock, subject to the proration and allocation procedures set forth in the Agreement and Plan of Merger, as amended, by and among Rudolph, Merger Sub and August Technology Corporation. At this time, the actual number of shares held by Mr. Wright is not known. Upon completion of the proration and allocation computations, an amended Form 4 shall be filed to reflect the shares of Rudolph common stock held by Mr. Wright. Pursuant to a merger agreement by and among the August Technology Corporation ("August"), Rudolph Technologies, Inc. ("Rudolph") and NS Merger Sub, Inc., a wholly-owned subsidiary of Rudolph (the "Merger"), the option to purchase 7,000 shares of August common stock for $9.27 per share, initially granted by August on March 10, 2000, which was fully vested, was assumed by Rudolph in the Merger and replaced with the referenced fully vested option. The option to purchase 7,500 shares of August common stock for $10.00 per share, initially granted by August on January 8, 2002, which was fully vested, was assumed by Rudolph in the Merger and replaced with the referenced fully vested option. The option to purchase 6,500 shares of August common stock for $11.29 per share, initially granted by August on January 25, 2006, which was fully vested, was assumed by Rudolph in the Merger and replaced with the referenced fully vested option. The option to purchase 7,500 shares of August common stock for $13.375 per share, initially granted by August on January 5, 2001, which was fully vested, was assumed by Rudolph in the Merger and replaced with the referenced fully vested option. The option to purchase 211 shares of August common stock for $14.24 per share, initially granted by August on April 5, 2002, which was fully vested, was assumed by Rudolph in the Merger and replaced with the referenced fully vested option. The option to purchase 5,927 shares of August common stock for $22.65 per share, initially granted by August on January 8, 2004, which was fully vested, was assumed by Rudolph in the Merger and replaced with the referenced fully vested option. By: /s/ Robert A. Koch For: Michael W. Wright 2006-02-17