X0202 4 2005-06-30 0 0001101302 ENTEGRIS INC ENTG 0001199621 WRIGHT MICHAEL WILLIAM 3500 LYMAN BOULEVARD CHASKA MN 55318 0 1 0 0 Chief Operating Officer Common Stock 77929 D Includes 1879 shares acquired under stock purchase plan on June 30, 2005. Reporting Person received a restricted stock grant of 12,500 shares on October 15, 2003. Reporting Person will be entitled to receive 25% of such shares on each October 15, 2004, 2005, 2006, 2007 provided Reporting Person has complied with certain restrictions such as continued employment. Reporting Person received a restricted stock grant of 25,000 shares on October 15, 2004. Reporting Person will be entitled to receive 25% of such shares on each October 15, 2005, 2006, 2007, 2008 provided Reporting Person has complied with certain restrictions such as continued employment. Reporting Person received a restricted stock grant of 10,000 shares on September 10, 2002. Reporting Person will be entitled to receive 25% of such shares on each June 3, 2003, 2004, 2005, and 2006 provided Reporting Person has complied with certain restrictions such as continued employment. By: /s/ Lori Cameron, Attorney-in-Fact for Michael W. Wright 2005-07-14