X0201 4/A2003-10-152003-10-16 0001101302 ENTEGRIS INC ENTG 0001199621 WRIGHT MICHAEL WILLIAM 3500 LYMAN BOULEVARD CHASKA MN 55318 0100Chief Operating OfficerCommon Stock2003-10-152003-10-154J012500A20983DStock Option (Right to Buy)13.502003-10-152003-10-154A060000A2004-10-152013-10-15Common Stock6000060000DReporting Person received a restricted stock grant on October 15, 2003. Reporting Person will be entitled to receive 25% of such shares on each of October 15, 2004, 2005, 2006, and 2007 provided Reporting Person has complied with certain restrictions such as continued employment.7,500 of these shares are subject to a restricted stock grant dated September 10, 2002, and will vest 2,500 shares on each of June 3, 2004, 2005, and 2006. 12,500 of these shares are subject to the restrictions set forth in Footnote 1.This option will vest in four annual installments with the first installment vesting on October 15, 2004.Lori Cameron, Attorney-in-Fact for Michael W. Wright2003-10-17