X0201 42003-09-09 0001101302 ENTEGRIS INC ENTG 0001199621 WRIGHT MICHAEL WILLIAM 3500 LYMAN BOULEVARD CHASKA MN 55318 0100Chief Operating OfficerStock Option (Right to Buy)7.532003-09-092003-09-094S0600015.55D2002-02-202011-02-20Common Stock4850042500D12,500 shares are exercisable; the remaining shares will vest as follows: 12,500 shares on each of February 21, 2004 and 2005.Lori Cameron, Attorney-in-Fact for Michael W. Wright2003-09-10