X0101 42003-05-30 0001101302 ENTEGRIS INC ENTG 0001199621 WRIGHT MICHAEL WILLIAM 0100Chief Operating OfficerStock Option (Right to Buy)4.222003-05-304S01779412.22D2000-09-062009-09-06Common Stock1904919049D17,794 shares are exercisable, and 19,049 shares will vest on June 7, 2003.Lori Cameron, Attorney-in-Fact for Michael W. Wright2003-06-03