X0202 4 2006-02-15 0001063527 AUGUST TECHNOLOGY CORP AUGT 0001199621 WRIGHT MICHAEL WILLIAM 3500 LYMAN BLVD. CHASKA MN 55318 1 0 0 0 Common Stock 2006-02-15 4 D 0 22888 D 0 D Stock Option (right to buy) 9.27 2006-02-15 4 D 0 7000 D 2007-03-10 Common Stock 7000 0 D Stock Option (right to buy) 13.375 2006-02-15 4 D 0 7500 D 2008-01-05 Common Stock 7500 0 D Stock Option (right to buy) 10.00 2006-02-15 4 D 0 7500 D 2009-01-08 Common Stock 7500 0 D Stock Option (right to buy) 14.24 2006-02-15 4 D 0 211 D 2009-04-05 Common Stock 211 0 D Stock Option (right to buy) 22.65 2006-02-15 4 D 0 5927 D 2011-01-08 Common Stock 5927 0 D Stock Option (right to buy) 11.29 2006-02-15 4 D 0 6500 D 2013-01-07 Common Stock 6500 0 D The shares were disposed of pursuant to a merger agreement by and among the Issuer, Rudolph Technologies, Inc. ("Rudolph") and NS Merger Sub, Inc., a wholly-owned subsidiary of Rudolph (the "Merger"), in exchange for (i) up to 17,452 shares of Rudolph common stock have a market value of $17.92 per share on the effective date of the Merger, representing 0.7625 shares of Rudolph common stock per share of the Issuer's stock, or (ii) a cash payment of up to $240,324, representing $10.50 per share of the Issuer's stock, or (iii) a combination of shares and cash in amounts determined according to the election of the reporting person, if any, and the proration and allocation procedures set forth in the merger agreement; the determination of the allocation of shares and cash will be made on or about February 22, 2006. The option, which was fully vested, was assumed by Rudolph in the Merger and replaced with an option to purchase 5,337 shares of Rudolph common stock for $12.16 per share. The option, which was fully vested, was assumed by Rudolph in the Merger and replaced with an option to purchase 5,718 shares of Rudolph common stock for $17.55 per share. The option, which was fully vested, was assumed by Rudolph in the Merger and replaced with an option to purchase 5,718 shares of Rudolph common stock for $13.12 per share. The option, which was fully vested, was assumed by Rudolph in the Merger and replaced with an option to purchase 160 shares of Rudolph common stock for $18.68 per share. The option, which was fully vested, was assumed by Rudolph in the Merger and replaced with an option to purchase 4,519 shares of Rudolph common stock for $29.71 per share. The option, which was fully vested, was assumed by Rudolph in the Merger and replaced with an option to purchase 4,956 shares of Rudolph common stock for $14.81 per share. /s/ Robert K. Ranum as Agent for Michael W. Wright pursuant to Power of Attorney previously filed. 2006-02-16