X0303 4 2011-05-04 0001101302 ENTEGRIS INC ENTG 0001198621 BRADLEY MICHAEL A 8 BARNSTABLE ROAD WEST NEWTON MA 02465 1 0 0 0 Common Stock 2011-05-04 4 A 0 11806 0 A 152375 D These shares were awarded, effective May 4, 2011, as Restricted Stock Units, payable solely in Common Stock, pursuant to the Entegris, Inc. 2010 Stock Plan which provides for the award of Restricted Stock Units to independent directors in consideration for services as such. Peter W. Walcott, Attorney-In-Fact for Michael A. Bradley 2011-05-05