X0306 4 2013-05-08 0001101302 ENTEGRIS INC ENTG 0001198621 BRADLEY MICHAEL A 8 BARNSTABLE ROAD WEST NEWTON MA 02465 1 0 0 0 Common Stock 2013-05-08 4 A 0 10406 0 A 88538 D These restricted stock units vest in full on the earlier of (1) the first anniversary date of the award, or (2) the date of the Company's 2014 Annual Meeting of Stockholders. These shares were awarded on May 8, 2013 as Restricted Stock Units, payable solely in Common Stock, pursuant to the Entegris, Inc. 2010 Stock Plan which provides for the award of Restricted Stock Units to independent directors in consideration for services as such. /s/Peter W. Walcott, Attorney-In-Fact for Michael A. Bradley 2013-05-10