X0305 4 2012-05-02 0001101302 ENTEGRIS INC ENTG 0001198621 BRADLEY MICHAEL A 8 BARNSTABLE ROAD WEST NEWTON MA 02465 1 0 0 0 Common Stock 2012-05-02 4 A 0 11123 0 A 78132 D These restricted stock units vest in full on the date of the Company's 2013 Annual Meeting of Stockholders. These shares were awarded on May 2, 2012 as Restricted Stock Units, payable solely in Common Stock, pursuant to the Entegris, Inc. 2010 Stock Plan which provides for the award of Restricted Stock Units to independent directors in consideration for services as such. /s/ Peter W. Walcott, Attorney-In-Fact for Michael A. Bradley 2012-05-03