X0303 4/A 2009-01-14 2009-01-16 0001101302 ENTEGRIS INC ENTG 0001198621 BRADLEY MICHAEL A 8 BARNSTABLE ROAD WEST NEWTON MA 02465 1 0 0 0 Common Stock 2009-01-14 4 A 0 6910 0 A 45322 D These shares are Restricted Stock Units payable only in Common Stock and were issued in connection with a reduction in director's fees which will remain in place through the 2009 Annual Meeting of Stockholders. The restrictions lapse January 14, 2010. The number of shares covered by this Restricted Stock Unit grant were calculated by dividing the amount of the reduction in director's fees referenced in footnote 1 by the closing price of $1.99 on the date of grant. This amemendment is to correct the number of shares that were reported due to a calculation error. /s/ Peter W. Walcott attorney-in-fact for Michael A. Bradley 2009-03-10