X0306 4 2016-03-31 1 0001094392 RUDOLPH TECHNOLOGIES INC RTEC 0001196449 MCLAUGHLIN PAUL F C/O RUDOLPH TECHNOLOGIES, INC. 16 JONSPIN RD WILMINGTON MA 01887 1 0 0 0 This filing is made solely to report Paul F. McLaughlin's termination of Section 16 insider status as of his March 31, 2016 retirement as the chairman of the Board of Directors for Rudolph Technologies, Inc. /s/ Robert A. Koch For: Paul F. McLaughlin 2016-03-31