X0303 4 2010-02-24 0 0001094392 RUDOLPH TECHNOLOGIES INC RTEC 0001196449 MCLAUGHLIN PAUL F C/O RUDOLPH TECHNOLOGIES, INC. ONE RUDOLPH ROAD, PO BOX 1000 FLANDERS NJ 07836 1 1 0 0 Chairman and CEO Common Stock 2010-02-24 4 S 0 2524 8.48 D 324577 D Common Stock 2010-02-25 4 S 0 20200 8.07 D 304377 D The amount of shares indicated in direct beneficial ownership include 148,520 shares of common stock from restricted stock units vesting. Common stock from the vesting of the restricted stock unit grant on May 27th, 2008 was adjusted to reflect 9.5% of the performance criteria being met. /s/ Paul F. McLaughlin 2010-03-01