X0202 4 2005-07-20 0 0000726514 ELECTRO SCIENTIFIC INDUSTRIES INC ESIO 0001195864 CHAMBERLAIN ROBERT G 13900 NW SCIENCE PARK DR. PORTLAND OR 97229 0 1 0 1 Senior Vice President Senior Vice President Common Stock 1953 D Non-Qualified Stock Option (right to buy) 19.84 2005-07-20 4 A 0 43000 A 2006-05-26 2015-07-20 Common Stock 43000 43000 D Incentive Stock Option (right to buy) 21.12 2004-01-15 2013-01-14 Common Stock 4734 4734 D Non-Qualified Stock Option (right to buy) 16.93 2004-08-15 2013-08-14 Common Stock 50000 50000 D Non-Qualified Stock Option (right to buy) 21.12 2004-01-15 2013-01-14 Common Stock 21516 21516 D Non-Qualified Stock Option (right to buy) 24.52 2004-10-29 2013-10-28 Common Stock 10000 10000 D Non-Qualified Stock Option (right to buy) 25.5 2014-07-12 Common Stock 14216 14216 D Performance Restricted Stock Units Grant 0 2007-07-12 2007-07-12 Common Stock 7385 7385 D Time-Based Restricted Stock Units Grant 0 2009-07-12 2009-07-12 Common Stock 9098 9098 D Option becomes 100% exercisable on 5/26/06. The shares underlying the option are restricted from being sold for a period of 3 years from the grant date. No purchase price is paid upon grant of option. Options become exercisable for 25% of the shares on the first four anniversaries of the grant date. Options become exercisable for 50% of the shares on the first two anniversaries of the grant date. Options become exercisable for 25% of the shares on the first four anniversaries of the grant date. Effective June 28, 2004 the vesting of the option was accelerated to be 100% vested on June 28, 2004. As a result of this vesting acceleration, the original ISO / NQ split of the total shares granted was adjusted if necessary to comply with the IRS limitation. Performance-Based Restricted Stock Units cliff vest after three years following grant date if certain levels of performance are achieved vs. a peer group of companies. Time-Based Restricted Stock Units vest 20% of the total shares on the first five anniversaries of the grant date. By: Kerry Mustoe For: Robert G. Chamberlain 2005-07-22