X0202 4 2007-12-13 0 0000836106 NOVELLUS SYSTEMS INC NVLS 0001185721 BENZING JEFFREY 4000 NORTH FIRST STREET SAN JOSE CA 95134 0 1 0 0 Exec. VP Business Operations Common Stock 2007-12-13 4 F 0 1787 26.15 D 50635 D Common Stock 2007-12-13 4 F 0 715 26.15 D 17511 I By Spouse Common Stock 2007-12-14 4 S 0 3213 25.7938 D 47422 D Common Stock 2007-12-14 4 S 0 1285 25.7938 D 16226 I By Spouse Common Stock 1284 I By 401k Shares were forfeited to cover tax obligation upon restricted stock release. Represents the Company's closing stock price on date of release. The indirect holdings by Mrs. Benzing include 804 estimated shares held in the Company 401k unitized stock fund. This balance is reported as of the last business day. The remaining shares are held in common stock and unvested restricted stock shares. The indirect holdings in the 401k are held in the Company unitized stock fund. The balance is reported as of the last business day. Jeffrey Benzing 2007-12-14