X0306 4 2012-10-11 0000841692 FSI INTERNATIONAL INC FSII 0001171663 GLARNER TERRENCE 160 MONTROSE PLACE ST. PAUL MN 55104 1 0 0 0 COMMON STOCK 2012-10-11 4 U 0 5656 6.20 D 0 D STOCK OPTION (RIGHT TO BUY) 3.54 2012-10-11 4 D 0 7500 2.66 D 2004-01-01 2013-01-28 COMMON STOCK 7500 0 D STOCK OPTION (RIGHT TO BUY) 4.21 2012-10-11 4 D 0 7500 1.99 D 2006-01-01 2015-01-26 COMMON STOCK 7500 0 D STOCK OPTION (RIGHT TO BUY) 4.95 2012-10-11 4 D 0 7500 1.25 D 2007-01-01 2016-01-24 COMMON STOCK 7500 0 D STOCK OPTION (RIGHT TO BUY) 5.00 2012-10-11 4 D 0 7500 1.20 D 2008-01-01 2017-01-17 COMMON STOCK 7500 0 D STOCK OPTION (RIGHT TO BUY) 1.74 2012-10-11 4 D 0 7500 4.46 D 2009-01-01 2018-01-16 COMMON STOCK 7500 0 D STOCK OPTION (RIGHT TO BUY) 0.372 2012-10-11 4 D 0 7500 5.828 D 2010-01-01 2019-01-21 COMMON STOCK 7500 0 D STOCK OPTION (RIGHT TO BUY) 3.11 2012-10-11 4 D 0 7500 3.09 D 2011-01-01 2020-01-20 COMMON STOCK 7500 0 D STOCK OPTION (RIGHT TO BUY) 4.06 2012-10-11 4 D 0 7500 2.14 D 2012-01-01 2021-01-19 COMMON STOCK 7500 0 D STOCK OPTION (RIGHT TO BUY) 4.27 2012-10-11 4 D 0 10000 1.93 D 2013-01-01 2022-01-18 COMMON STOCK 10000 0 D In connection with the merger of RB Merger Corp. ("Purchaser") with and into FSI International, Inc. ("FSI") pursuant to that Agreement and Plan of Merger, dated as of August 13, 2012, among FSI, Purchaser and Tokyo Electron Limited, this option was cancelled and converted into the right to receive a cash payment representing the difference, if any, between (a) $6.20 multiplied by the number of shares subject to the option and (b) the aggregate exercise price for all shares subject to the option. /s/ Patricia M. Hollister, Chief Financial Officer, as Power of Attorney for Terrence W. Glarner 2012-10-15