X0201 42004-01-2100000841692FSI INTERNATIONAL INC FSII0001171663GLARNER TERRENCE160 MONTROSE PLACEST. PAULMN551041000Stock Option (Right to Buy)8.052004-01-214A075008.05A2005-01-212014-01-21Common Stock75007500D/s/ Patricia M. Hollister, Chief Financial Officer, as Power of Attorney for Terrence W. Glarner2004-01-22