Power OF ATTORNEY

Known all by these presents, that the undersigned hereby authorizes
(i) Michael Olivas or Darren Milliken of Accuray Incorporated
(the "Company") and (ii) any attorney employed in the Palo Alto, CA office
of Wilson Sonsini Goodrich & Rosati, to execute for and on behalf
of the undersigned, in the undersigned's capacity as an officer
and/or director of the Company, Forms 3, 4, and 5, and any amendments
thereto, and cause such form(s) to be filed with the U.S. Securities
and Exchange Commission (the "SEC") pursuant to Section 16(a) of the
Securities Act of 1934, relating to the undersigned's beneficial
ownership of securities in the Company. The undersigned hereby grants
to each such attorney-in-fact full power and authority to do and perform
any and every act and thing whatsoever requisite, necessary, or proper
to be done in the exercise of any of the rights and powers herein granted,
as fully to all intents and purposes as the undersigned might or could do
if personally present, with full power of substitution or revocation,
hereby ratifying and confirming all that such attorney-in-fact, or such
attorney-in-fact's substitute or substitutes shall lawfully do or cause
to be done by virtue of this power of attorney and the rights and powers
herein granted. The undersigned acknowledges that the foregoing
attorneys-in-fact, in serving in such capacity at the request of the
undersigned, are not assuming, nor is the Company assuming, any of
the undersigned's responsibilities to comply with
Section 16 of the Securities Exchange Act of 1934.
This power of attorney shall remain in full force and effect until
the undersigned is no longer required to file Forms 3, 4, and 5 with
respect to the undersigned's holdings of, and transactions in,
securities issued by the Company, unless earlier revoked by the
undersigned in a signed writing delivered to the foregoing
attorneys-in-fact.

IN WITNESS WHEREOF, the undersigned has caused this Power of Attorney
to be executed as of this 21st day of June, 2010.

/s/ Dennis Winger
Signature

Dennis Winger
Print Name