X0304 4 2012-02-09 0 0001041577 ATMI INC ATMI 0001136879 NEUGOLD DOUGLAS A 6 COMMERCE DR DANBURY CT US 06810 1 1 0 0 Chairman, President and CEO Common Stock 2012-02-09 4 D 0 14679 0 D 129278 D Non-Qualified Stock Option(right to buy) 24.05 2012-02-09 4 A 0 39880 0 A Common Stock 39880 39880 D Total Shareholder Return Performance RSU 0 2012-02-09 4 A 0 12855 0 A Common Stock 12855 12855 D Total Shareholder Return Performance RSU 0 2012-02-09 4 A 0 12855 0 A Common Stock 12855 12855 D Total Shareholder Return Performance RSU 0 2012-02-09 4 A 0 12855 0 A Common Stock 12855 12855 D 28,680 Performance based RSA's were originally granted on 2/10/11 contingent on achievement of certain targets. 14,001 shares were earned based upon the criteria. Non-qualified stock options vest ratably on each anniversary date over the four-year period following the grant date and expire on the tenth anniversary of the grant date. Total Shareholder Return Performance Restricted Stock Units can be earned based upon the relative total shareholder return of ATMI common stock versus the Russell 2000 Index during the performance period from January 1, 2012 - December 31, 2012. Share amount shown represents maximum potential grant pursuant to this award, which represents 175% of the target award. The ultimate grant amount earned can range from zero to the maximum amount depending on relative performance over the applicable period. Vesting takes place, as applicable, after the performance level is determined. Total Shareholder Return Performance Restricted Stock Units can be earned based upon the relative total shareholder return of ATMI common stock versus the Russell 2000 Index during the performance period from January 1, 2012 - December 31, 2013. Share amount shown represents maximum potential grant pursuant to this award, which represents 175% of the target award. The ultimate grant amount earned can range from zero to the maximum amount depending on relative performance over the applicable period. Vesting takes place, as applicable, after the performance level is determined. Total Shareholder Return Performance Restricted Stock Units can be earned based upon the relative total shareholder return of ATMI common stock versus the Russell 2000 Index during the performance period from January 1, 2012 - December 31, 2014. Share amount shown represents maximum potential grant pursuant to this award, which represents 175% of the target award. The ultimate grant amount earned can range from zero to the maximum amount depending on relative performance over the applicable period. Vesting takes place, as applicable, after the performance level is determined. Total Shareholder Return Performance Restricted Stock Units Earned amount vests immediately upon determination of performance. Any unearned amount, upon determination of performance, expires immediately. /s/Ellen T. Harmon, atty-in-fact 2012-02-10