X0202 4 2007-07-02 0001101302 ENTEGRIS INC ENTG 0001134619 DAUWALTER JAMES E 3250 JULIAN DRIVE CHASKA MN 55318 1 0 0 0 Common Stock 2007-07-02 4 M 0 30000 3.15 A 86175 D Common Stock 2007-07-02 4 S 0 300 11.69 D 85875 D Common Stock 2007-07-02 4 S 0 200 11.71 D 85675 D Common Stock 2007-07-02 4 S 0 100 11.72 D 85575 D Common Stock 2007-07-02 4 S 0 300 11.73 D 85275 D Common Stock 2007-07-02 4 S 0 3500 11.74 D 81775 D Common Stock 2007-07-02 4 S 0 2000 11.74 D 79775 D Common Stock 2007-07-02 4 S 0 700 11.75 D 79075 D Common Stock 2007-07-02 4 S 0 400 11.76 D 78675 D Common Stock 2007-07-02 4 S 0 100 11.76 D 78575 D Common Stock 2007-07-02 4 S 0 1000 11.77 D 77575 D Common Stock 2007-07-02 4 S 0 300 11.77 D 77275 D Common Stock 2007-07-02 4 S 0 800 11.78 D 76475 D Common Stock 2007-07-02 4 S 0 400 11.78 D 76075 D Common Stock 2007-07-02 4 S 0 800 11.79 D 75275 D Common Stock 2007-07-02 4 S 0 800 11.80 D 74475 D Common Stock 2007-07-02 4 S 0 3600 11.81 D 70875 D Common Stock 2007-07-02 4 S 0 100 11.81 D 70775 D Common Stock 2007-07-02 4 S 0 900 11.82 D 69875 D Common Stock 2007-07-02 4 S 0 100 11.84 D 69775 D Common Stock 2007-07-02 4 S 0 100 11.85 D 69675 D Common Stock 2007-07-02 4 S 0 400 11.86 D 69275 D Common Stock 2007-07-02 4 S 0 1200 11.87 D 68075 D Common Stock 2007-07-02 4 S 0 100 11.87 D 67975 D Common Stock 2007-07-02 4 S 0 500 11.88 D 67475 D Common Stock 2007-07-02 4 S 0 1400 11.89 D 66075 D Common Stock 2007-07-02 4 S 0 200 11.89 D 65875 D Common Stock 2007-07-02 4 S 0 2500 11.90 D 63375 D Common Stock 2007-07-02 4 S 0 400 11.91 D 62975 D Common Stock 2007-07-02 4 S 0 300 11.92 D 62675 D Employee Stock Option (Right to Buy) 3.15 2007-07-02 4 M 0 30000 0 D 2008-12-12 Common Stock 30000 180000 D Indicated sales were effected pursuant to a Rule 10b5-1 Plan adopted by the Reporting Person on September 8, 2006. This option is fully vested. These options were acquired pursuant to an employee stock option plan that provided for the grant of options in consideration of services as an employee. This is the first of two Form 4's. Peter W. Walcott, Attorney-in-Fact for James E. Dauwalter 2007-07-03