X0202 4 2007-05-01 0001101302 ENTEGRIS INC ENTG 0001134619 DAUWALTER JAMES E 3250 JULIAN DRIVE CHASKA MN 55318 1 0 0 0 Common Stock 2007-05-01 4 S 0 3000 11.50 D 315621 I By Judith V. Dauwalter Rev. Trust UA 12/11/2001 Common Stock 2007-05-01 4 S 0 2000 11.53 D 313621 I By Judith V. Dauwalter Rev. Trust UA 12/11/2001 Common Stock 2007-05-01 4 S 0 6000 11.55 D 307621 I By Judith V. Dauwalter Rev. Trust UA 12/11/2001 Common Stock 2007-05-01 4 S 0 2000 11.56 D 305621 I By Judith V. Dauwalter Rev. Trust UA 12/11/2001 Common Stock 2007-05-01 4 S 0 5000 11.57 D 300621 I By Judith V. Dauwalter Rev. Trust UA 12/11/2001 Common Stock 2007-05-01 4 S 0 2000 11.60 D 298621 I By Judith V. Dauwalter Rev. Trust UA 12/11/2001 Common Stock 2007-05-01 4 S 0 4700 11.62 D 293921 I By Judith V. Dauwalter Rev. Trust UA 12/11/2001 Common Stock 2007-05-01 4 S 0 300 11.63 D 293621 I By Judith V. Dauwalter Rev. Trust UA 12/11/2001 Common Stock 56175 D Common Stock 118719 I By James E. Dauwalter Rev. Trust UA 12/11/2001 Common Stock 96666 I By James E. Dauwalter Irrev. Trust UA 4/10/2000 Common Stock 634244 I By Carville Company, LP Common Stock 77336 I By Carville Company II, LP Common Stock 173146 I By Carville Company III, LP Common Stock 1187000 I By Davar, LP Common Stock 34806 I By JJD Industries, LLC Common Stock 251668 I By 401(k) Plan Common Stock 170366 I By Judith V. Dauwalter GRAT I Indicated sales were effected pursuant to a Rule 10b5-1 Plan adopted by the Reporting Person on March 5, 2007. Peter W. Walcott, Attorney-in-Fact for James E. Dauwalter 2007-05-01