X0202 4 2007-04-02 0001101302 ENTEGRIS INC ENTG 0001134619 DAUWALTER JAMES E 3250 JULIAN DRIVE CHASKA MN 55318 1 0 0 0 Common Stock 2007-04-02 4 M 0 30000 3.15 A 86175 D Common Stock 2007-04-02 4 S 0 1600 10.60 D 84575 D Common Stock 2007-04-02 4 S 0 700 10.60 D 83875 D Common Stock 2007-04-02 4 S 0 2100 10.61 D 81775 D Common Stock 2007-04-02 4 S 0 700 10.62 D 81075 D Common Stock 2007-04-02 4 S 0 200 10.63 D 80875 D Common Stock 2007-04-02 4 S 0 200 10.63 D 80675 D Common Stock 2007-04-02 4 S 0 1900 10.64 D 78775 D Common Stock 2007-04-02 4 S 0 400 10.65 D 78375 D Common Stock 2007-04-02 4 S 0 900 10.66 D 77475 D Common Stock 2007-04-02 4 S 0 4500 10.67 D 72975 D Common Stock 2007-04-02 4 S 0 2100 10.67 D 70875 D Common Stock 2007-04-02 4 S 0 3200 10.68 D 67675 D Common Stock 2007-04-02 4 S 0 1800 10.69 D 65875 D Common Stock 2007-04-02 4 S 0 400 10.70 D 65475 D Common Stock 2007-04-02 4 S 0 1576 10.71 D 63899 D Common Stock 2007-04-02 4 S 0 2800 10.72 D 61099 D Common Stock 2007-04-02 4 S 0 1917 10.73 D 59182 D Common Stock 2007-04-02 4 S 0 2607 10.74 D 56575 D Common Stock 2007-04-02 4 S 0 400 10.75 D 56175 D Common Stock 118719 I By James E. Dauwalter Rev. Trust UA 12/11/2001 Common Stock 96666 I By James E. Dauwalter Irrev. Trust UA 4/10/2000 Common Stock 318621 I By Judith V. Dauwalter Rev. Trust UA 12/11/2001 Common Stock 634244 I By Carville Company, LP Common Stock 77336 I By Carville Company II, LP Common Stock 173146 I By Carville Company III, LP Common Stock 1187000 I By Davar, LP Common Stock 34806 I By JJD Industries, LLC Common Stock 251668 I By 401(k) Plan Common Stock 170366 I By Judith V. Dauwalter GRAT I Employee Stock Option (right to buy) 3.15 2007-04-02 4 M 0 30000 D 2001-12-12 2007-12-12 Common Stock 30000 19994 D Indicated sales were effected pursuant to a Rule 10b5-1 Plan adopted by the reporting person on September 8, 2006. These options were acquired pursuant to an employee stock option plan that provided for the grant of options in consideration of services as an employee. This Form 4 filing was due on April 4, 2007 and is filed late due to a delay in trade notification from the Reporting Person's broker. Peter W. Walcott, Attorney-in-Fact for James E. Dauwalter 2007-04-10