X0202 4 2007-01-03 0001101302 ENTEGRIS INC ENTG 0001134619 DAUWALTER JAMES E 3250 JULIAN DRIVE CHASKA MN 55318 1 0 0 0 Common Stock 2007-01-03 4 M 0 30000 3.15 A 115319 D Common Stock 2007-01-03 4 S 0 500 10.67 D 114819 D Common Stock 2007-01-03 4 S 0 800 10.68 D 114019 D Common Stock 2007-01-03 4 S 0 2100 10.69 D 111919 D Common Stock 2007-01-03 4 S 0 1300 10.70 D 110619 D Common Stock 2007-01-03 4 S 0 900 10.71 D 109719 D Common Stock 2007-01-03 4 S 0 600 10.72 D 109119 D Common Stock 2007-01-03 4 S 0 400 10.73 D 108719 D Common Stock 2007-01-03 4 S 0 200 10.74 D 108519 D Common Stock 2007-01-03 4 S 0 300 10.75 D 108219 D Common Stock 2007-01-03 4 S 0 100 10.76 D 108119 D Common Stock 2007-01-03 4 S 0 200 10.77 D 107919 D Common Stock 2007-01-03 4 S 0 200 10.78 D 107719 D Common Stock 2007-01-03 4 S 0 800 10.79 D 106919 D Common Stock 2007-01-03 4 S 0 2000 10.80 D 104919 D Common Stock 2007-01-03 4 S 0 900 10.81 D 104019 D Common Stock 2007-01-03 4 S 0 600 10.82 D 103419 D Common Stock 2007-01-03 4 S 0 1200 10.83 D 102219 D Common Stock 2007-01-03 4 S 0 1700 10.84 D 100519 D Common Stock 2007-01-03 4 S 0 1100 10.85 D 99419 D Common Stock 2007-01-03 4 S 0 100 10.86 D 99319 D Common Stock 2007-01-03 4 S 0 500 10.87 D 98819 D Common Stock 2007-01-03 4 S 0 200 10.89 D 98619 D Common Stock 2007-01-03 4 S 0 3700 10.90 D 94919 D Common Stock 2007-01-03 4 S 0 3700 10.91 D 91219 D Common Stock 2007-01-03 4 S 0 200 10.92 D 91019 D Common Stock 2007-01-03 4 S 0 600 10.93 D 90419 D Common Stock 2007-01-03 4 S 0 1500 10.94 D 88919 D Common Stock 2007-01-03 4 S 0 1700 10.95 D 87219 D Employee Stock Option (right to buy) 3.15 2007-01-03 4 M 0 30000 D 2001-12-12 2007-12-12 Common Stock 30000 105414 D Indicated sales were effected pursuant to a Rule 10b5-1 Plan adopted by the reporting person on September 8, 2006. These options were acquired pursuant to an employee stock option plan that provided for the grant of options in consideration of services as an employee. Remarks: This is the first of two form 4's - 1-3-07 Peter W. Walcott, Attorney-in-Fact for James E. Dauwalter 2007-01-05