Note 3 - STRATEGIC PARTNERSHIP AGREEMENT WITH ADVANTEST AND RELATED PARTY TRANSACTIONS (Details)		3 Months Ended		9 Months Ended
	Jul. 29, 2020 USD ($) shares	Sep. 30, 2022 USD ($)	Sep. 30, 2021 USD ($)	Sep. 30, 2022 USD ($)	Sep. 30, 2021 USD ($)	Dec. 31, 2021 USD ($)
Contract revenues		$ 39,860,000	$ 29,555,000	$ 108,026,000	$ 81,174,000
Strategic Partnership for Joint Development and Sales Technology Solutions
Stock Issued During Period, Shares, New Issues (in shares) | shares	3,306,924
Proceeds from Issuance of Common Stock	$ 65,200,000
Commercial Agreement With Advantest
Contract revenues		2,800,000	$ 2,700,000	8,100,000	$ 7,900,000
Related party receivables		10,400,000		10,400,000		$ 0
Deferred contract revenues		$ 9,100,000		$ 9,100,000		$ 6,800,000
Number contract termination events		0		0