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Note 4 - BUSINESS COMBINATION - Fair Values of Assets Acquired and Liabilities Assumed and the Related Useful Lives (Details) - USD ($)
$ in Thousands
12 Months Ended
Dec. 31, 2020
Dec. 31, 2021
Dec. 31, 2019
Goodwill $ 15,774 $ 14,123 $ 2,293
Cimetrix Incorporated [Member]      
Fair value of tangible assets (including cash of $5,900) 8,298    
Goodwill 11,830    
Total assets acquired 39,927    
Accounts payable and accrued expenses 1,447    
Deferred revenue 375    
Operating lease liabilities 132    
Deferred tax liabilities 439    
Total liabilities assumed 2,393    
Total purchase price allocation 37,534    
Cimetrix Incorporated [Member] | In Process Research and Development [Member]      
Fair value of indefinite-lived intangible assets 3,635    
Developed Technology Rights [Member] | Cimetrix Incorporated [Member]      
Fair value of cash 5,900    
Fair value of finite-lived intangible assets $ 12,541    
Finite-lived intangible assets, amortization period (Year) 8 years    
Customer Relationships [Member] | Cimetrix Incorporated [Member]      
Fair value of finite-lived intangible assets $ 1,967    
Finite-lived intangible assets, amortization period (Year) 10 years    
Noncompete Agreements [Member] | Cimetrix Incorporated [Member]      
Fair value of finite-lived intangible assets $ 848    
Finite-lived intangible assets, amortization period (Year) 3 years    
Trademarks and Trade Names [Member] | Cimetrix Incorporated [Member]      
Fair value of finite-lived intangible assets $ 808    
Finite-lived intangible assets, amortization period (Year) 10 years