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Note 4 - BUSINESS COMBINATION - Narrative (Details) - USD ($)
$ in Thousands
1 Months Ended 3 Months Ended 12 Months Ended
Dec. 01, 2020
Dec. 31, 2020
Dec. 31, 2021
Dec. 31, 2021
Dec. 31, 2020
Payments to Acquire Businesses, Net of Cash Acquired, Total       $ 3,054 $ 28,580
Increase (decrease) in goodwill due to the acquisition purchase price adjustment       1,651 0
Cimetrix Incorporated [Member]          
Business Combination, Consideration Transferred, Total $ 37,500        
Payments to Acquire Businesses, Net of Cash Acquired, Total 31,600        
Business Combination, Holdback Amount 3,500        
Business Combination, Acquired Receivables, Gross Contractual Amount   $ 1,600     1,600
Business Combination, Estimated Cash Payout to Certain Employees $ 1,400        
Goodwill after purchase price adjustment       3,100  
Increase (decrease) in deferred tax liabilities     $ (1,300)    
Increase (decrease) in goodwill due to the acquisition purchase price adjustment     (1,700)    
Business Combination, Acquisition Related Costs   1,600      
Cimetrix Incorporated [Member] | Accrued Compensation and Related Benefits [Member]          
Business Combination, Accrued Estimated Cash Payout to Certain Employees   $ 300 $ 500 $ 500 $ 300