XML 44 R33.htm IDEA: XBRL DOCUMENT v3.21.2
Note 4 - BUSINESS COMBINATION - Other (Details) - USD ($)
$ in Thousands
1 Months Ended 3 Months Ended
Dec. 31, 2020
Jun. 30, 2021
Mar. 31, 2021
Restricted Cash, Total   $ 3,019  
Cimetrix Incorporated [Member]      
Payments to Acquire Businesses, Net of Cash Acquired, Total $ 28,600    
Business Combination, Holdback Amount 3,500   $ 3,000
Goodwill, Period Increase (Decrease), Total     $ (500)
Business Combination, Estimated Cash Payout to Certain Employees 1,400    
Business Combination, Estimated Remaining Cash Payout to Certain Employees   900  
Business Combination, Acquisition Related Costs 1,600 0  
Cimetrix Incorporated [Member] | Prepaid Expenses and Other Current Assets [Member]      
Restricted Cash, Total 3,500 3,000  
Cimetrix Incorporated [Member] | Accrued Compensation and Related Benefits [Member]      
Business Combination, Accrued Estimated Cash Payout to Certain Employees $ 300 $ 100