0002101601-25-000002.txt : 20251222 0002101601-25-000002.hdr.sgml : 20251222 20251222170943 ACCESSION NUMBER: 0002101601-25-000002 CONFORMED SUBMISSION TYPE: 3 PUBLIC DOCUMENT COUNT: 2 CONFORMED PERIOD OF REPORT: 20251219 FILED AS OF DATE: 20251222 DATE AS OF CHANGE: 20251222 REPORTING-OWNER: OWNER DATA: COMPANY CONFORMED NAME: Mahoney Robert John CENTRAL INDEX KEY: 0002101601 ORGANIZATION NAME: FILING VALUES: FORM TYPE: 3 SEC ACT: 1934 Act SEC FILE NUMBER: 000-30941 FILM NUMBER: 251593361 MAIL ADDRESS: STREET 1: 108 CHERRY HILL DRIVE CITY: BEVERLY STATE: MA ZIP: 01915 ISSUER: COMPANY DATA: COMPANY CONFORMED NAME: AXCELIS TECHNOLOGIES INC CENTRAL INDEX KEY: 0001113232 STANDARD INDUSTRIAL CLASSIFICATION: SPECIAL INDUSTRY MACHINERY, NEC [3559] ORGANIZATION NAME: 06 Technology EIN: 341818596 STATE OF INCORPORATION: DE FISCAL YEAR END: 1231 BUSINESS ADDRESS: STREET 1: 108 CHERRY HILL DRIVE CITY: BEVERLY STATE: MA ZIP: 01915 BUSINESS PHONE: 978-787-4000 MAIL ADDRESS: STREET 1: 108 CHERRY HILL DRIVE CITY: BEVERLY STATE: MA ZIP: 01915 FORMER COMPANY: FORMER CONFORMED NAME: EATON SEMICONDUCTOR EQUIPMENT INC DATE OF NAME CHANGE: 20000501 3 1 form3-12222025_101240.xml X0206 3 2025-12-19 0 0001113232 AXCELIS TECHNOLOGIES INC ACLS 0002101601 Mahoney Robert John 108 CHERRY HILL DRIVE BEVERLY MA 01915 false true false false EVP Global Operations Common Stock 13472 D Of the shares held as of December 19, 2025, 9,877 were issuable on vesting of restricted stock units granted to the executive under the 2012 Equity Incentive Plan and are subject to forfeiture. /s/ Eileen J. Evans, Attorney-in-Fact 2025-12-22 EX-24 2 ex24-12222025_101240.htm ex24-12222025_101240.htm

Exhibit 24.1


POWER OF ATTORNEY

For Executing Reports under Section 16(a)

with respect to securities of

AXCELIS TECHNOLOGIES, INC.

 

The undersigned hereby constitutes and appoints each of Russell J. Low, James G. Coogan, Eileen J. Evans, Lynnette C. Fallon, and Megan Gates, Esq. of the Covington & Burling law firm, each acting singly, the undersigned’s true and lawful attorney-in-fact, from the date hereof until this Power of Attorney is revoked, to:

 

(1)

execute, for and on behalf of the undersigned, Forms 3, 4 and 5 with respect to securities of Axcelis Technologies, Inc. in accordance with Section 16(a) of the Securities Exchange Act of 1934 and the rules thereunder, it being understood that the documents executed by such attorney-in-fact on behalf of the undersigned pursuant to this Power of Attorney shall be in such form and shall contain such terms and conditions as such attorney-in-fact may approve in his or her discretion; and

 

(2)

do and perform any and all acts, for and on behalf of the undersigned, that may be necessary or desirable to complete the execution of any such Form 3, 4 or 5 and the timely filing of such form with the United States Securities and Exchange Commission and any other authority.

 

The undersigned hereby grants to each such attorney-in-fact full power and authority to do and perform all and every act and thing whatsoever requisite, necessary and proper to be done in the exercise of any of the rights and powers herein granted, as fully for all intents and purposes as the undersigned might or could do if personally present, with full power of substitution or revocation, hereby ratifying and confirming all that such attorney-in-fact, or his or her substitute or substitutes, shall lawfully do or cause to be done by virtue of this power of attorney and the rights and powers herein granted. The undersigned acknowledges that the foregoing attorneys-in-fact, in serving in such capacity at the request of the undersigned, are not assuming any of the undersigned’s responsibilities to comply with Section 16 of the Securities Exchange Act of 1934.

 

IN WITNESS WHEREOF, the undersigned has caused this Power of Attorney to be executed this 19 day of November, 2025.

 


 

/s/ Robert Mahoney

 

Robert Mahoney