144 0001940017 XXXXXXXX LIVE 0001113232 AXCELIS TECHNOLOGIES, INC. 000-30941 108 Cherry Hill Drive Beverly MA 01915 978-787-4000 GREGORY F REDINBO Officer Common Morgan Stanley Smith Barney LLC Executive Financial Services

1 New York Plaza 8th Floor New York NY 10004

2883 463730.55 30719000 05/13/2026 NASDAQ Common 09/15/2023 Restricted stock vesting under a registered plan Issuer N 498 09/15/2023 Not Applicable Common 06/15/2023 Restricted stock vesting under a registered plan Issuer N 1766 06/15/2023 Not Applicable Common 05/16/2023 Restricted stock vesting under a registered plan Issuer N 453 05/16/2023 Not Applicable Common 06/15/2022 Restricted stock vesting under a registered plan Issuer N 166 06/15/2022 Not Applicable Y 05/13/2026 /s/ Gregory Redinbo