0001950047-23-003801.txt : 20230907 0001950047-23-003801.hdr.sgml : 20230907 20230907161333 ACCESSION NUMBER: 0001950047-23-003801 CONFORMED SUBMISSION TYPE: 144 PUBLIC DOCUMENT COUNT: 1 FILED AS OF DATE: 20230907 DATE AS OF CHANGE: 20230907 SUBJECT COMPANY: COMPANY DATA: COMPANY CONFORMED NAME: AXCELIS TECHNOLOGIES INC CENTRAL INDEX KEY: 0001113232 STANDARD INDUSTRIAL CLASSIFICATION: SPECIAL INDUSTRY MACHINERY, NEC [3559] IRS NUMBER: 341818596 STATE OF INCORPORATION: DE FISCAL YEAR END: 1231 FILING VALUES: FORM TYPE: 144 SEC ACT: 1933 Act SEC FILE NUMBER: 000-30941 FILM NUMBER: 231242389 BUSINESS ADDRESS: STREET 1: 108 CHERRY HILL DRIVE CITY: BEVERLY STATE: MA ZIP: 01915 BUSINESS PHONE: 978-787-4000 MAIL ADDRESS: STREET 1: 108 CHERRY HILL DRIVE CITY: BEVERLY STATE: MA ZIP: 01915 FORMER COMPANY: FORMER CONFORMED NAME: EATON SEMICONDUCTOR EQUIPMENT INC DATE OF NAME CHANGE: 20000501 REPORTING-OWNER: COMPANY DATA: COMPANY CONFORMED NAME: Low Russell CENTRAL INDEX KEY: 0001689237 FILING VALUES: FORM TYPE: 144 MAIL ADDRESS: STREET 1: 108 CHERRY HILL DRIVE CITY: BEVERLY STATE: MA ZIP: 01915 144 1 primary_doc.xml 144 0001689237 XXXXXXXX LIVE 0001113232 AXCELIS TECHNOLOGIES, INC 000-30941 108 Cherry Hill Drive Beverly MA 01915 978-787-4000 RUSSELL LOW Officer Common Morgan Stanley Smith Barney LLC Executive Financial Services

1 New York Plaza 38th Floor New York NY 10004

3405 610349.31 32817464 09/07/2023 NASDAQ Common 02/28/2022 Restricted stock vesting under a registered plan Issuer N 3405 02/28/2022 Not Applicable N Russell Low

108 Cherry Hill Drive Beverly MA 01915

Common 06/08/2023 3509 608482.00 09/07/2023 /s/ Russell Low