0001950047-23-000971.txt : 20230525 0001950047-23-000971.hdr.sgml : 20230525 20230525170012 ACCESSION NUMBER: 0001950047-23-000971 CONFORMED SUBMISSION TYPE: 144 PUBLIC DOCUMENT COUNT: 1 FILED AS OF DATE: 20230525 DATE AS OF CHANGE: 20230525 SUBJECT COMPANY: COMPANY DATA: COMPANY CONFORMED NAME: AXCELIS TECHNOLOGIES INC CENTRAL INDEX KEY: 0001113232 STANDARD INDUSTRIAL CLASSIFICATION: SPECIAL INDUSTRY MACHINERY, NEC [3559] IRS NUMBER: 341818596 STATE OF INCORPORATION: DE FISCAL YEAR END: 1231 FILING VALUES: FORM TYPE: 144 SEC ACT: 1933 Act SEC FILE NUMBER: 000-30941 FILM NUMBER: 23961787 BUSINESS ADDRESS: STREET 1: 108 CHERRY HILL DRIVE CITY: BEVERLY STATE: MA ZIP: 01915 BUSINESS PHONE: 978-787-4000 MAIL ADDRESS: STREET 1: 108 CHERRY HILL DRIVE CITY: BEVERLY STATE: MA ZIP: 01915 FORMER COMPANY: FORMER CONFORMED NAME: EATON SEMICONDUCTOR EQUIPMENT INC DATE OF NAME CHANGE: 20000501 REPORTING-OWNER: COMPANY DATA: COMPANY CONFORMED NAME: PUMA MARY G CENTRAL INDEX KEY: 0001158015 FILING VALUES: FORM TYPE: 144 MAIL ADDRESS: STREET 1: AXCELIS TECHNOLOGIES INC. STREET 2: 108 CHERRY HILL DRIVE CITY: BEVERLY STATE: MA ZIP: 01915 144 1 primary_doc.xml 144 0001158015 XXXXXXXX LIVE 0001113232 AXCELIS TECHNOLOGIES, INC 000-30941 108 Cherry Hill Drive Beverly MA 01915 978-787-4000 MARY PUMA Officer Common Morgan Stanley Smith Barney LLC Executive Financial Services

1 New York Plaza 38th Floor New York NY 10004

19722 2994296.59 32711130 05/25/2023 NASDAQ Common 05/16/2020 Restricted stock vesting under a registered plan Issuer N 4520 05/16/2020 Not Applicable Common 05/16/2020 Restricted stock vesting under a registered plan Issuer N 10424 05/16/2020 Not Applicable Common 05/17/2020 Restricted stock vesting under a registered plan Issuer N 4778 05/17/2020 Not Applicable N Mary Puma

108 Cherry Hill Drive Beverly MA 01915

Common 05/18/2023 8578 1213951.00 MARY PUMA

108 Cherry Hill Drive Beverly MA 01915

Common 05/11/2023 21705 2713125.00 05/25/2023 /s/ Mary Puma