0001950047-23-000763.txt : 20230518 0001950047-23-000763.hdr.sgml : 20230518 20230518163426 ACCESSION NUMBER: 0001950047-23-000763 CONFORMED SUBMISSION TYPE: 144 PUBLIC DOCUMENT COUNT: 1 FILED AS OF DATE: 20230518 DATE AS OF CHANGE: 20230518 SUBJECT COMPANY: COMPANY DATA: COMPANY CONFORMED NAME: AXCELIS TECHNOLOGIES INC CENTRAL INDEX KEY: 0001113232 STANDARD INDUSTRIAL CLASSIFICATION: SPECIAL INDUSTRY MACHINERY, NEC [3559] IRS NUMBER: 341818596 STATE OF INCORPORATION: DE FISCAL YEAR END: 1231 FILING VALUES: FORM TYPE: 144 SEC ACT: 1933 Act SEC FILE NUMBER: 000-30941 FILM NUMBER: 23936605 BUSINESS ADDRESS: STREET 1: 108 CHERRY HILL DRIVE CITY: BEVERLY STATE: MA ZIP: 01915 BUSINESS PHONE: 978-787-4000 MAIL ADDRESS: STREET 1: 108 CHERRY HILL DRIVE CITY: BEVERLY STATE: MA ZIP: 01915 FORMER COMPANY: FORMER CONFORMED NAME: EATON SEMICONDUCTOR EQUIPMENT INC DATE OF NAME CHANGE: 20000501 REPORTING-OWNER: COMPANY DATA: COMPANY CONFORMED NAME: Lawson Douglas A. CENTRAL INDEX KEY: 0001420601 FILING VALUES: FORM TYPE: 144 MAIL ADDRESS: STREET 1: 21 VILLAGE VIEW ROAD CITY: WESTFORD STATE: MA ZIP: 01886 144 1 primary_doc.xml 144 0001420601 XXXXXXXX LIVE 0001113232 AXCELIS TECHNOLOGIES, INC 000-30941 108 Cherry Hill Drive Beverly MA 01915 978-787-4000 DOUGLAS LAWSON Officer Common Morgan Stanley Smith Barney LLC Executive Financial Services

1 New York Plaza 38th Floor New York NY 10004

4703 663339.34 32711130 05/18/2023 NASD Common 05/15/2023 Restricted Stock Units Vested under S-8 Issuer Registered Plan Issuer N 3099 05/15/2023 Not Applicable Common 05/17/2022 Restricted Stock Units Vested under S-8 Issuer Registered Plan Issuer N 932 05/17/2022 Not Applicable Common 05/16/2023 Restricted Stock Units Vested under S-8 Issuer Registered Plan Issuer N 672 05/16/2023 Not Applicable N Douglas Lawson

108 Cherry Hill Drive Beverly MA 01915

Common 05/10/2023 5734 699548.00 05/18/2023 /s/ Douglas Lawson