XML 64 R53.htm IDEA: XBRL DOCUMENT v3.25.1
Inventories, net (Details) - USD ($)
$ in Thousands
Mar. 31, 2025
Dec. 31, 2024
Inventories, net    
Raw materials $ 224,943 $ 227,141
Work in process 45,692 34,490
Finished goods (completed systems) 25,215 20,594
Inventories, net $ 295,850 $ 282,225