Revenue - Deferred revenue (Details) - USD ($) $ in Thousands	3 Months Ended
Mar. 31, 2025	Mar. 31, 2024
Revenue
Balance, beginning of the period	$ 138,174	$ 210,885
Deferral of revenue	26,359	42,974
Recognition of deferred revenue	(25,209)	(45,441)
Balance, end of the period	139,324	$ 208,418
Reclassification from deferred revenue to refund liability	$ 8,000

The amount of deferral of revenue in obligation to transfer good or service to customer for which consideration from customer has been received or is due.

No definition available.

+ Details

Name:	acls_ContractWithCustomerLiabilityDeferralOfRevenue
Namespace Prefix:	acls_
Data Type:	xbrli:monetaryItemType
Balance Type:	credit
Period Type:	duration

- Definition

The returned current portion, due within one year or one operating cycle, if longer, of deposits held other than customer deposits.

+ References

No definition available.

+ Details

Name:	acls_DepositLiabilityReturnedCurrent
Namespace Prefix:	acls_
Data Type:	xbrli:monetaryItemType
Balance Type:	debit
Period Type:	instant

- Definition

Amount of obligation to transfer good or service to customer for which consideration has been received or is receivable.

+ References

Reference 1: http://www.xbrl.org/2003/role/disclosureRef
-Topic 606
-SubTopic 10
-Name Accounting Standards Codification
-Section 45
-Paragraph 1
-Publisher FASB
-URI https://asc.fasb.org/1943274/2147479837/606-10-45-1

Reference 2: http://www.xbrl.org/2003/role/disclosureRef
-Topic 606
-SubTopic 10
-Name Accounting Standards Codification
-Section 50
-Paragraph 8
-Subparagraph (a)
-Publisher FASB
-URI https://asc.fasb.org/1943274/2147479806/606-10-50-8

Reference 3: http://www.xbrl.org/2003/role/disclosureRef
-Topic 606
-SubTopic 10
-Name Accounting Standards Codification
-Section 45
-Paragraph 2
-Publisher FASB
-URI https://asc.fasb.org/1943274/2147479837/606-10-45-2

+ Details

Name:	us-gaap_ContractWithCustomerLiability
Namespace Prefix:	us-gaap_
Data Type:	xbrli:monetaryItemType
Balance Type:	credit
Period Type:	instant

- Definition

Amount of revenue recognized that was previously included in balance of obligation to transfer good or service to customer for which consideration from customer has been received or is due.

+ References

Reference 1: http://www.xbrl.org/2003/role/disclosureRef
-Topic 606
-SubTopic 10
-Name Accounting Standards Codification
-Section 50
-Paragraph 8
-Subparagraph (b)
-Publisher FASB
-URI https://asc.fasb.org/1943274/2147479806/606-10-50-8

+ Details

Name:	us-gaap_ContractWithCustomerLiabilityRevenueRecognized
Namespace Prefix:	us-gaap_
Data Type:	xbrli:monetaryItemType
Balance Type:	credit
Period Type:	duration

- References

No definition available.

+ Details

Name:	us-gaap_RevenueFromContractWithCustomerAbstract
Namespace Prefix:	us-gaap_
Data Type:	xbrli:stringItemType
Balance Type:	na
Period Type:	duration