Business Segment and Geographic Region Information - Revenue by Product Line (Details) - USD ($) $ in Thousands	12 Months Ended
	Dec. 31, 2024	Dec. 31, 2023	Dec. 31, 2022
Revenue by product lines
Total revenue	$ 1,017,865	$ 1,130,604	$ 919,998
Ion implantation systems and services
Revenue by product lines
Total revenue	1,001,045	1,111,278	898,132
Other systems and services
Revenue by product lines
Total revenue	$ 16,820	$ 19,326	$ 21,866