Leases - Future Minimum Cash Outflow and Weighted-average Remaining Lease Term and Discount Rate (Details) - USD ($) $ in Thousands	Dec. 31, 2024	Dec. 31, 2023
Future minimum lease payments finance lease
2025	$ 5,930
2026	6,008
2027	6,128
2028	6,251
2029	6,376
Thereafter	48,960
Total lease payments	79,653
Less interest portion	(35,979)
Finance lease obligations	43,674
Future minimum lease payments operating lease
2025	6,663
2026	5,083
2027	3,339
2028	2,381
2029	2,269
Thereafter	22,384
Total lease payments	42,119
Less interest portion	(12,328)
Operating lease obligations	29,791
Future minimum lease payments finance and operating lease
2025	12,593
2026	11,091
2027	9,467
2028	8,632
2029	8,645
Thereafter	71,344
Total lease payments	121,772
Less interest portion	(48,307)
Total lease liabilities	73,465	$ 75,887
Lease term and discount rate
Right of use asset	29,621	30,716
Prepaid rent	500	600
Operating liabilities noncurrent	$ 25,321	$ 25,724
Finance lease term	22 years
Operating leases -Weighted-average remaining lease term (in years)	11 years
Finance leases - Weighted-average remaining lease term (in years)	12 years 1 month 6 days
Operating leases - Weighted-average discount rate	5.50%
Finance leases - Weighted-average discount rate	10.50%
Minimum
Lease term and discount rate
Operating lease term	1 year
Maximum
Lease term and discount rate
Operating lease term	16 years

n/a.

No definition available.

Name:	acls_FinanceAndOperatingLeaseLiabilitiesPaymentsDueAbstract
Namespace Prefix:	acls_
Data Type:	xbrli:stringItemType
Balance Type:	na
Period Type:	duration

- Definition

Amount of lessee's undiscounted obligation for lease payments for finance and operating lease.

+ References

No definition available.

+ Details

Name:	acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDue
Namespace Prefix:	acls_
Data Type:	xbrli:monetaryItemType
Balance Type:	credit
Period Type:	instant

- Definition

Amount of lessee's undiscounted obligation for lease payments for finance and operating lease, due after fifth fiscal year following latest fiscal year.

+ References

No definition available.

+ Details

Name:	acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDueAfterYearFive
Namespace Prefix:	acls_
Data Type:	xbrli:monetaryItemType
Balance Type:	credit
Period Type:	instant

- Definition

Amount of lessee operating and finance lease liability payments due next twelve months.

+ References

No definition available.

+ Details

Name:	acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDueNextTwelveMonths
Namespace Prefix:	acls_
Data Type:	xbrli:monetaryItemType
Balance Type:	credit
Period Type:	instant

- Definition

Amount of lessee's undiscounted obligation for lease payments for finance and operating lease, due in fifth fiscal year following latest fiscal year.

+ References

No definition available.

+ Details

Name:	acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDueYearFive
Namespace Prefix:	acls_
Data Type:	xbrli:monetaryItemType
Balance Type:	credit
Period Type:	instant

- Definition

Amount of lessee's undiscounted obligation for lease payments for finance and operating lease, due in fourth fiscal year following latest fiscal year.

+ References

No definition available.

+ Details

Name:	acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDueYearFour
Namespace Prefix:	acls_
Data Type:	xbrli:monetaryItemType
Balance Type:	credit
Period Type:	instant

- Definition

Amount of lessee's undiscounted obligation for lease payments for finance and operating lease, due in third fiscal year following latest fiscal year.

+ References

No definition available.

+ Details

Name:	acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDueYearThree
Namespace Prefix:	acls_
Data Type:	xbrli:monetaryItemType
Balance Type:	credit
Period Type:	instant

- Definition

Amount of lessee's undiscounted obligation for lease payments for finance and operating lease, due in second fiscal year following latest fiscal year.

+ References

No definition available.

+ Details

Name:	acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDueYearTwo
Namespace Prefix:	acls_
Data Type:	xbrli:monetaryItemType
Balance Type:	credit
Period Type:	instant

- Definition

Amount of lessee's undiscounted obligation for lease payments in excess of discounted obligation for lease payments for finance and operating lease.

+ References

No definition available.

+ Details

Name:	acls_LesseeOperatingAndFinanceLeaseLiabilityUndiscountedExcessAmount
Namespace Prefix:	acls_
Data Type:	xbrli:monetaryItemType
Balance Type:	credit
Period Type:	instant

- Definition

Present value of lessee's discounted obligation for lease payments from operating and finance lease.

+ References

No definition available.

+ Details

Name:	acls_OperatingAndFinanceLeaseLiability
Namespace Prefix:	acls_
Data Type:	xbrli:monetaryItemType
Balance Type:	credit
Period Type:	instant

- Definition

n/a.

+ References

No definition available.

+ Details

Name:	acls_WeightedAverageRemainingLeaseTermAndDiscountRateAbstract
Namespace Prefix:	acls_
Data Type:	xbrli:stringItemType
Balance Type:	na
Period Type:	duration

- References

No definition available.

+ Details

Name:	us-gaap_FinanceLeaseLiabilitiesPaymentsDueAbstract
Namespace Prefix:	us-gaap_
Data Type:	xbrli:stringItemType
Balance Type:	na
Period Type:	duration

- Definition

Present value of lessee's discounted obligation for lease payments from finance lease.

+ References

Reference 1: http://www.xbrl.org/2003/role/disclosureRef
-Topic 842
-SubTopic 20
-Name Accounting Standards Codification
-Section 50
-Paragraph 6
-Publisher FASB
-URI https://asc.fasb.org/1943274/2147478964/842-20-50-6

Reference 2: http://www.xbrl.org/2003/role/disclosureRef
-Topic 842
-SubTopic 20
-Name Accounting Standards Codification
-Section 45
-Paragraph 1
-Subparagraph (b)
-Publisher FASB
-URI https://asc.fasb.org/1943274/2147479041/842-20-45-1

+ Details

Name:	us-gaap_FinanceLeaseLiability
Namespace Prefix:	us-gaap_
Data Type:	xbrli:monetaryItemType
Balance Type:	credit
Period Type:	instant

- Definition

Amount of lessee's undiscounted obligation for lease payments for finance lease.

+ References

+ Details

Name:	us-gaap_FinanceLeaseLiabilityPaymentsDue
Namespace Prefix:	us-gaap_
Data Type:	xbrli:monetaryItemType
Balance Type:	credit
Period Type:	instant

- Definition

Amount of lessee's undiscounted obligation for lease payment for finance lease to be paid after fifth fiscal year following current fiscal year. Excludes interim and annual periods when interim periods are reported from current statement of financial position date (rolling approach).

+ References

+ Details

Name:	us-gaap_FinanceLeaseLiabilityPaymentsDueAfterYearFive
Namespace Prefix:	us-gaap_
Data Type:	xbrli:monetaryItemType
Balance Type:	credit
Period Type:	instant

- Definition

Amount of lessee's undiscounted obligation for lease payment for finance lease to be paid in next fiscal year following current fiscal year. Excludes interim and annual periods when interim periods are reported from current statement of financial position date (rolling approach).

+ References

+ Details

Name:	us-gaap_FinanceLeaseLiabilityPaymentsDueNextTwelveMonths
Namespace Prefix:	us-gaap_
Data Type:	xbrli:monetaryItemType
Balance Type:	credit
Period Type:	instant

- Definition

Amount of lessee's undiscounted obligation for lease payment for finance lease to be paid in fifth fiscal year following current fiscal year. Excludes interim and annual periods when interim periods are reported from current statement of financial position date (rolling approach).

+ References

+ Details

Name:	us-gaap_FinanceLeaseLiabilityPaymentsDueYearFive
Namespace Prefix:	us-gaap_
Data Type:	xbrli:monetaryItemType
Balance Type:	credit
Period Type:	instant

- Definition

Amount of lessee's undiscounted obligation for lease payment for finance lease to be paid in fourth fiscal year following current fiscal year. Excludes interim and annual periods when interim periods are reported from current statement of financial position date (rolling approach).

+ References

+ Details

Name:	us-gaap_FinanceLeaseLiabilityPaymentsDueYearFour
Namespace Prefix:	us-gaap_
Data Type:	xbrli:monetaryItemType
Balance Type:	credit
Period Type:	instant

- Definition

Amount of lessee's undiscounted obligation for lease payment for finance lease to be paid in third fiscal year following current fiscal year. Excludes interim and annual periods when interim periods are reported from current statement of financial position date (rolling approach).

+ References

+ Details

Name:	us-gaap_FinanceLeaseLiabilityPaymentsDueYearThree
Namespace Prefix:	us-gaap_
Data Type:	xbrli:monetaryItemType
Balance Type:	credit
Period Type:	instant

- Definition

Amount of lessee's undiscounted obligation for lease payment for finance lease to be paid in second fiscal year following current fiscal year. Excludes interim and annual periods when interim periods are reported from current statement of financial position date (rolling approach).

+ References

+ Details

Name:	us-gaap_FinanceLeaseLiabilityPaymentsDueYearTwo
Namespace Prefix:	us-gaap_
Data Type:	xbrli:monetaryItemType
Balance Type:	credit
Period Type:	instant

- Definition

Amount of lessee's undiscounted obligation for lease payments in excess of discounted obligation for lease payments for finance lease.

+ References

+ Details

Name:	us-gaap_FinanceLeaseLiabilityUndiscountedExcessAmount
Namespace Prefix:	us-gaap_
Data Type:	xbrli:monetaryItemType
Balance Type:	credit
Period Type:	instant

- Definition

Weighted average discount rate for finance lease calculated at point in time.

+ References

Reference 1: http://www.xbrl.org/2003/role/exampleRef
-Topic 842
-SubTopic 20
-Name Accounting Standards Codification
-Section 55
-Paragraph 53
-Publisher FASB
-URI https://asc.fasb.org/1943274/2147479589/842-20-55-53

Reference 2: http://www.xbrl.org/2003/role/disclosureRef
-Topic 842
-SubTopic 20
-Name Accounting Standards Codification
-Section 50
-Paragraph 4
-Subparagraph (g)(4)
-Publisher FASB
-URI https://asc.fasb.org/1943274/2147478964/842-20-50-4

+ Details

Name:	us-gaap_FinanceLeaseWeightedAverageDiscountRatePercent
Namespace Prefix:	us-gaap_
Data Type:	dtr-types:percentItemType
Balance Type:	na
Period Type:	instant

- Definition

Weighted average remaining lease term for finance lease, in 'PnYnMnDTnHnMnS' format, for example, 'P1Y5M13D' represents reported fact of one year, five months, and thirteen days.

+ References

Reference 1: http://www.xbrl.org/2003/role/exampleRef
-Topic 842
-SubTopic 20
-Name Accounting Standards Codification
-Section 55
-Paragraph 53
-Publisher FASB
-URI https://asc.fasb.org/1943274/2147479589/842-20-55-53

Reference 2: http://www.xbrl.org/2003/role/disclosureRef
-Topic 842
-SubTopic 20
-Name Accounting Standards Codification
-Section 50
-Paragraph 4
-Subparagraph (g)(3)
-Publisher FASB
-URI https://asc.fasb.org/1943274/2147478964/842-20-50-4

+ Details

Name:	us-gaap_FinanceLeaseWeightedAverageRemainingLeaseTerm1
Namespace Prefix:	us-gaap_
Data Type:	xbrli:durationItemType
Balance Type:	na
Period Type:	instant

- Definition

Term of lessee's finance lease, in 'PnYnMnDTnHnMnS' format, for example, 'P1Y5M13D' represents reported fact of one year, five months, and thirteen days.

+ References

Reference 1: http://www.xbrl.org/2009/role/commonPracticeRef
-Topic 842
-SubTopic 20
-Name Accounting Standards Codification
-Section 50
-Paragraph 3
-Subparagraph (a)(3)
-Publisher FASB
-URI https://asc.fasb.org/1943274/2147478964/842-20-50-3

+ Details

Name:	us-gaap_LesseeFinanceLeaseTermOfContract1
Namespace Prefix:	us-gaap_
Data Type:	xbrli:durationItemType
Balance Type:	na
Period Type:	instant

- Definition

Amount of lessee's undiscounted obligation for lease payment for operating lease.

+ References

+ Details

Name:	us-gaap_LesseeOperatingLeaseLiabilityPaymentsDue
Namespace Prefix:	us-gaap_
Data Type:	xbrli:monetaryItemType
Balance Type:	credit
Period Type:	instant

- Definition

Amount of lessee's undiscounted obligation for lease payment for operating lease due after fifth fiscal year following current fiscal year. Excludes interim and annual periods when interim periods are reported from current statement of financial position date (rolling approach).

+ References

+ Details

Name:	us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueAfterYearFive
Namespace Prefix:	us-gaap_
Data Type:	xbrli:monetaryItemType
Balance Type:	credit
Period Type:	instant

- Definition

Amount of lessee's undiscounted obligation for lease payment for operating lease to be paid in next fiscal year following current fiscal year. Excludes interim and annual periods when interim periods are reported from current statement of financial position date (rolling approach).

+ References

+ Details

Name:	us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueNextTwelveMonths
Namespace Prefix:	us-gaap_
Data Type:	xbrli:monetaryItemType
Balance Type:	credit
Period Type:	instant

- Definition

Amount of lessee's undiscounted obligation for lease payment for operating lease to be paid in fifth fiscal year following current fiscal year. Excludes interim and annual periods when interim periods are reported from current statement of financial position date (rolling approach).

+ References

+ Details

Name:	us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueYearFive
Namespace Prefix:	us-gaap_
Data Type:	xbrli:monetaryItemType
Balance Type:	credit
Period Type:	instant

- Definition

Amount of lessee's undiscounted obligation for lease payment for operating lease to be paid in fourth fiscal year following current fiscal year. Excludes interim and annual periods when interim periods are reported from current statement of financial position date (rolling approach).

+ References

+ Details

Name:	us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueYearFour
Namespace Prefix:	us-gaap_
Data Type:	xbrli:monetaryItemType
Balance Type:	credit
Period Type:	instant

- Definition

Amount of lessee's undiscounted obligation for lease payment for operating lease to be paid in third fiscal year following current fiscal year. Excludes interim and annual periods when interim periods are reported from current statement of financial position date (rolling approach).

+ References

+ Details

Name:	us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueYearThree
Namespace Prefix:	us-gaap_
Data Type:	xbrli:monetaryItemType
Balance Type:	credit
Period Type:	instant

- Definition

Amount of lessee's undiscounted obligation for lease payment for operating lease to be paid in second fiscal year following current fiscal year. Excludes interim and annual periods when interim periods are reported from current statement of financial position date (rolling approach).

+ References

+ Details

Name:	us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueYearTwo
Namespace Prefix:	us-gaap_
Data Type:	xbrli:monetaryItemType
Balance Type:	credit
Period Type:	instant

- Definition

Amount of lessee's undiscounted obligation for lease payments in excess of discounted obligation for lease payments for operating lease.

+ References

+ Details

Name:	us-gaap_LesseeOperatingLeaseLiabilityUndiscountedExcessAmount
Namespace Prefix:	us-gaap_
Data Type:	xbrli:monetaryItemType
Balance Type:	credit
Period Type:	instant

- Definition

Term of lessee's operating lease, in 'PnYnMnDTnHnMnS' format, for example, 'P1Y5M13D' represents reported fact of one year, five months, and thirteen days.

+ References

+ Details

Name:	us-gaap_LesseeOperatingLeaseTermOfContract
Namespace Prefix:	us-gaap_
Data Type:	xbrli:durationItemType
Balance Type:	na
Period Type:	instant

- References

No definition available.

+ Details

Name:	us-gaap_OperatingLeaseLiabilitiesPaymentsDueAbstract
Namespace Prefix:	us-gaap_
Data Type:	xbrli:stringItemType
Balance Type:	na
Period Type:	duration

- Definition

Present value of lessee's discounted obligation for lease payments from operating lease.

+ References

Reference 1: http://www.xbrl.org/2003/role/disclosureRef
-Topic 842
-SubTopic 20
-Name Accounting Standards Codification
-Section 45
-Paragraph 1
-Subparagraph (b)
-Publisher FASB
-URI https://asc.fasb.org/1943274/2147479041/842-20-45-1

+ Details

Name:	us-gaap_OperatingLeaseLiability
Namespace Prefix:	us-gaap_
Data Type:	xbrli:monetaryItemType
Balance Type:	credit
Period Type:	instant

- Definition

Present value of lessee's discounted obligation for lease payments from operating lease, classified as noncurrent.

+ References

+ Details

Name:	us-gaap_OperatingLeaseLiabilityNoncurrent
Namespace Prefix:	us-gaap_
Data Type:	xbrli:monetaryItemType
Balance Type:	credit
Period Type:	instant

- Definition

Amount of lessee's right to use underlying asset under operating lease.

+ References

Reference 1: http://www.xbrl.org/2003/role/disclosureRef
-Topic 842
-SubTopic 20
-Name Accounting Standards Codification
-Section 45
-Paragraph 1
-Subparagraph (a)
-Publisher FASB
-URI https://asc.fasb.org/1943274/2147479041/842-20-45-1

+ Details

Name:	us-gaap_OperatingLeaseRightOfUseAsset
Namespace Prefix:	us-gaap_
Data Type:	xbrli:monetaryItemType
Balance Type:	debit
Period Type:	instant

- Definition

Weighted average discount rate for operating lease calculated at point in time.

+ References

+ Details

Name:	us-gaap_OperatingLeaseWeightedAverageDiscountRatePercent
Namespace Prefix:	us-gaap_
Data Type:	dtr-types:percentItemType
Balance Type:	na
Period Type:	instant

- Definition

Weighted average remaining lease term for operating lease, in 'PnYnMnDTnHnMnS' format, for example, 'P1Y5M13D' represents reported fact of one year, five months, and thirteen days.

+ References

Reference 1: http://www.xbrl.org/2003/role/exampleRef
-Topic 842
-SubTopic 20
-Name Accounting Standards Codification
-Section 55
-Paragraph 53
-Publisher FASB
-URI https://asc.fasb.org/1943274/2147479589/842-20-55-53

Reference 2: http://www.xbrl.org/2003/role/disclosureRef
-Topic 842
-SubTopic 20
-Name Accounting Standards Codification
-Section 50
-Paragraph 4
-Subparagraph (g)(3)
-Publisher FASB
-URI https://asc.fasb.org/1943274/2147478964/842-20-50-4

+ Details

Name:	us-gaap_OperatingLeaseWeightedAverageRemainingLeaseTerm1
Namespace Prefix:	us-gaap_
Data Type:	xbrli:durationItemType
Balance Type:	na
Period Type:	instant

- Definition

Amount of asset related to consideration paid in advance for rent that provides economic benefits within a future period of one year or the normal operating cycle, if longer.

+ References

Reference 1: http://www.xbrl.org/2003/role/exampleRef
-Topic 210
-SubTopic 10
-Name Accounting Standards Codification
-Section 45
-Paragraph 1
-Subparagraph (g)(3)
-Publisher FASB
-URI https://asc.fasb.org/1943274/2147483467/210-10-45-1

Reference 2: http://www.xbrl.org/2009/role/commonPracticeRef
-Topic 340
-SubTopic 10
-Name Accounting Standards Codification
-Section 45
-Paragraph 1
-Publisher FASB
-URI https://asc.fasb.org/1943274/2147483032/340-10-45-1

Reference 3: http://www.xbrl.org/2003/role/exampleRef
-Topic 340
-SubTopic 10
-Name Accounting Standards Codification
-Section 05
-Paragraph 5
-Subparagraph (c)
-Publisher FASB
-URI https://asc.fasb.org/1943274/2147482955/340-10-05-5

+ Details

Name:	us-gaap_PrepaidRent
Namespace Prefix:	us-gaap_
Data Type:	xbrli:monetaryItemType
Balance Type:	debit
Period Type:	instant

- Details

Name:	srt_RangeAxis=srt_MinimumMember
Namespace Prefix:
Data Type:	na
Balance Type:
Period Type:

- Details

Name:	srt_RangeAxis=srt_MaximumMember
Namespace Prefix:
Data Type:	na
Balance Type:
Period Type: