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Inventories, net (Details) - USD ($)
$ in Thousands
Jun. 30, 2024
Dec. 31, 2023
Inventories, net    
Raw materials $ 220,910 $ 231,200
Work in process 40,481 45,373
Finished goods (completed systems) 21,699 29,909
Inventories, net $ 283,090 $ 306,482