Revenue (Details) - USD ($) $ in Thousands	6 Months Ended
	Jun. 30, 2024	Mar. 31, 2024	Dec. 31, 2023	Jun. 30, 2023	Mar. 31, 2023	Dec. 31, 2022
Disaggregation of Revenue
Deferred revenue	$ 174,011	$ 208,418	$ 210,885	$ 182,540	$ 201,725	$ 154,777
Short-term deferred revenue	148,390		164,677
Long-term deferred revenue	$ 25,621		$ 46,208
Systems
Disaggregation of Revenue
Payment upon shipment of the system, as a percent	90.00%
Payment upon acceptance, as a percent	10.00%
Systems | Minimum
Disaggregation of Revenue
Pre-shipment deposit, as a percent	20.00%
Systems | Maximum
Disaggregation of Revenue
Pre-shipment deposit, as a percent	60.00%
Aftermarket | Minimum
Disaggregation of Revenue
Payment upon delivery of parts, period	30 days
Aftermarket | Maximum
Disaggregation of Revenue
Payment upon delivery of parts, period	60 days