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Inventories, net (Details) - USD ($)
$ in Thousands
Mar. 31, 2024
Dec. 31, 2023
Inventories, net    
Raw materials $ 236,480 $ 231,200
Work in process 47,455 45,373
Finished goods (completed systems) 28,235 29,909
Inventories, net $ 312,170 $ 306,482