Leases - Future Minimum Cash Outflow and Weighted-average Remaining Lease Term and Discount Rate (Details) $ in Thousands	Mar. 31, 2024 USD ($) ft²	Dec. 31, 2023 USD ($)
Future minimum lease payments finance lease
2024	$ 4,698
2025	5,930
2026	6,008
2027	6,128
2028	6,251
Thereafter	55,336
Total lease payments	84,351
Less interest portion	(39,520)
Finance lease obligations	44,831
Future minimum lease payments operating lease
2024	4,979
2025	3,484
2026	2,443
2027	1,915
2028	22,730
Thereafter	42,139
Total lease payments	77,690
Less interest portion	(48,082)
Operating lease obligations	29,608
Future minimum lease payments finance and operating lease
2024	9,677
2025	9,414
2026	8,451
2027	8,043
2028	28,981
Thereafter	97,475
Total lease payments	162,041
Less interest portion	(87,602)
Total lease liabilities	74,439	$ 75,887
Lease term and discount rate
Right of use asset	29,557	30,716
Prepaid rent	600	600
Operating liabilities noncurrent	$ 24,963	$ 25,724
Finance lease term	22 years
Operating leases -Weighted-average remaining lease term (in years)	11 years 6 months
Finance leases - Weighted-average remaining lease term (in years)	12 years 9 months 18 days
Operating leases - Weighted-average discount rate	5.50%
Finance leases - Weighted-average discount rate	10.50%
Beverly Property Owner LLC
Lease term and discount rate
Area of Property \| ft²	101,800
Minimum
Lease term and discount rate
Operating lease term	1 year
Maximum
Lease term and discount rate
Operating lease term	16 years

Area of land for finance lease not yet commenced.

No definition available.

Name:	acls_AreaOfLandFinanceLeaseNotYetCommenced
Namespace Prefix:	acls_
Data Type:	dtr-types:areaItemType
Balance Type:	na
Period Type:	instant

- Definition

n/a.

+ References

No definition available.

+ Details

Name:	acls_FinanceAndOperatingLeaseLiabilitiesPaymentsDueAbstract
Namespace Prefix:	acls_
Data Type:	xbrli:stringItemType
Balance Type:	na
Period Type:	duration

- Definition

Amount of lessee's undiscounted obligation for lease payment for finance lease to be paid after fourth fiscal year following current fiscal year. Excludes interim and annual periods when interim periods are reported from current statement of financial position date (rolling approach).

+ References

No definition available.

+ Details

Name:	acls_FinanceLeaseLiabilityPaymentsDueAfterYearFour
Namespace Prefix:	acls_
Data Type:	xbrli:monetaryItemType
Balance Type:	credit
Period Type:	instant

- Definition

Amount of lessee's undiscounted obligation for lease payments for finance and operating lease.

+ References

No definition available.

+ Details

Name:	acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDue
Namespace Prefix:	acls_
Data Type:	xbrli:monetaryItemType
Balance Type:	credit
Period Type:	instant

- Definition

Amount of lessee's undiscounted obligation for lease payments for finance and operating lease, due after fourth fiscal year following latest fiscal year.

+ References

No definition available.

+ Details

Name:	acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDueAfterYearFour
Namespace Prefix:	acls_
Data Type:	xbrli:monetaryItemType
Balance Type:	credit
Period Type:	instant

- Definition

Amount of lessee operating and finance lease liability payments due next twelve months.

+ References

No definition available.

+ Details

Name:	acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDueNextTwelveMonths
Namespace Prefix:	acls_
Data Type:	xbrli:monetaryItemType
Balance Type:	credit
Period Type:	instant

- Definition

Amount of lessee's undiscounted obligation for lease payments for finance and operating lease, due in fourth fiscal year following latest fiscal year.

+ References

No definition available.

+ Details

Name:	acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDueYearFour
Namespace Prefix:	acls_
Data Type:	xbrli:monetaryItemType
Balance Type:	credit
Period Type:	instant

- Definition

Amount of lessee's undiscounted obligation for lease payments for finance and operating lease, due in third fiscal year following latest fiscal year.

+ References

No definition available.

+ Details

Name:	acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDueYearThree
Namespace Prefix:	acls_
Data Type:	xbrli:monetaryItemType
Balance Type:	credit
Period Type:	instant

- Definition

Amount of lessee's undiscounted obligation for lease payments for finance and operating lease, due in second fiscal year following latest fiscal year.

+ References

No definition available.

+ Details

Name:	acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsDueYearTwo
Namespace Prefix:	acls_
Data Type:	xbrli:monetaryItemType
Balance Type:	credit
Period Type:	instant

- Definition

Amount of lessee's undiscounted obligation for lease payments for finance and operating lease having an initial or remaining lease term in excess of one year due in remainder of fiscal year following latest fiscal year.

+ References

No definition available.

+ Details

Name:	acls_LesseeOperatingAndFinanceLeaseLiabilityPaymentsRemainderOfFiscalYear
Namespace Prefix:	acls_
Data Type:	xbrli:monetaryItemType
Balance Type:	credit
Period Type:	instant

- Definition

Amount of lessee's undiscounted obligation for lease payments in excess of discounted obligation for lease payments for finance and operating lease.

+ References

No definition available.

+ Details

Name:	acls_LesseeOperatingAndFinanceLeaseLiabilityUndiscountedExcessAmount
Namespace Prefix:	acls_
Data Type:	xbrli:monetaryItemType
Balance Type:	credit
Period Type:	instant

- Definition

Amount of lessee's undiscounted obligation for lease payment for operating lease due after fourth fiscal year following current fiscal year. Excludes interim and annual periods when interim periods are reported from current statement of financial position date (rolling approach).

+ References

No definition available.

+ Details

Name:	acls_LesseeOperatingLeaseLiabilityPaymentsDueAfterYearFour
Namespace Prefix:	acls_
Data Type:	xbrli:monetaryItemType
Balance Type:	credit
Period Type:	instant

- Definition

Present value of lessee's discounted obligation for lease payments from operating and finance lease.

+ References

No definition available.

+ Details

Name:	acls_OperatingAndFinanceLeaseLiability
Namespace Prefix:	acls_
Data Type:	xbrli:monetaryItemType
Balance Type:	credit
Period Type:	instant

- Definition

n/a.

+ References

No definition available.

+ Details

Name:	acls_WeightedAverageRemainingLeaseTermAndDiscountRateAbstract
Namespace Prefix:	acls_
Data Type:	xbrli:stringItemType
Balance Type:	na
Period Type:	duration

- References

No definition available.

+ Details

Name:	us-gaap_FinanceLeaseLiabilitiesPaymentsDueAbstract
Namespace Prefix:	us-gaap_
Data Type:	xbrli:stringItemType
Balance Type:	na
Period Type:	duration

- Definition

Present value of lessee's discounted obligation for lease payments from finance lease.

+ References

Reference 1: http://www.xbrl.org/2003/role/disclosureRef
-Topic 842
-SubTopic 20
-Name Accounting Standards Codification
-Section 50
-Paragraph 6
-Publisher FASB
-URI https://asc.fasb.org//1943274/2147478964/842-20-50-6

Reference 2: http://www.xbrl.org/2003/role/disclosureRef
-Topic 842
-SubTopic 20
-Name Accounting Standards Codification
-Section 45
-Paragraph 1
-Subparagraph (b)
-Publisher FASB
-URI https://asc.fasb.org//1943274/2147479041/842-20-45-1

+ Details

Name:	us-gaap_FinanceLeaseLiability
Namespace Prefix:	us-gaap_
Data Type:	xbrli:monetaryItemType
Balance Type:	credit
Period Type:	instant

- Definition

Amount of lessee's undiscounted obligation for lease payments for finance lease.

+ References

+ Details

Name:	us-gaap_FinanceLeaseLiabilityPaymentsDue
Namespace Prefix:	us-gaap_
Data Type:	xbrli:monetaryItemType
Balance Type:	credit
Period Type:	instant

- Definition

Amount of lessee's undiscounted obligation for lease payment for finance lease to be paid in next fiscal year following current fiscal year. Excludes interim and annual periods when interim periods are reported from current statement of financial position date (rolling approach).

+ References

+ Details

Name:	us-gaap_FinanceLeaseLiabilityPaymentsDueNextTwelveMonths
Namespace Prefix:	us-gaap_
Data Type:	xbrli:monetaryItemType
Balance Type:	credit
Period Type:	instant

- Definition

Amount of lessee's undiscounted obligation for lease payment for finance lease to be paid in fourth fiscal year following current fiscal year. Excludes interim and annual periods when interim periods are reported from current statement of financial position date (rolling approach).

+ References

+ Details

Name:	us-gaap_FinanceLeaseLiabilityPaymentsDueYearFour
Namespace Prefix:	us-gaap_
Data Type:	xbrli:monetaryItemType
Balance Type:	credit
Period Type:	instant

- Definition

Amount of lessee's undiscounted obligation for lease payment for finance lease to be paid in third fiscal year following current fiscal year. Excludes interim and annual periods when interim periods are reported from current statement of financial position date (rolling approach).

+ References

+ Details

Name:	us-gaap_FinanceLeaseLiabilityPaymentsDueYearThree
Namespace Prefix:	us-gaap_
Data Type:	xbrli:monetaryItemType
Balance Type:	credit
Period Type:	instant

- Definition

Amount of lessee's undiscounted obligation for lease payment for finance lease to be paid in second fiscal year following current fiscal year. Excludes interim and annual periods when interim periods are reported from current statement of financial position date (rolling approach).

+ References

+ Details

Name:	us-gaap_FinanceLeaseLiabilityPaymentsDueYearTwo
Namespace Prefix:	us-gaap_
Data Type:	xbrli:monetaryItemType
Balance Type:	credit
Period Type:	instant

- Definition

Amount of lessee's undiscounted obligation for lease payment for finance lease to be paid in remainder of current fiscal year.

+ References

Reference 1: http://www.xbrl.org/2009/role/commonPracticeRef
-Topic 842
-SubTopic 20
-Name Accounting Standards Codification
-Section 50
-Paragraph 6
-Publisher FASB
-URI https://asc.fasb.org//1943274/2147478964/842-20-50-6

+ Details

Name:	us-gaap_FinanceLeaseLiabilityPaymentsRemainderOfFiscalYear
Namespace Prefix:	us-gaap_
Data Type:	xbrli:monetaryItemType
Balance Type:	credit
Period Type:	instant

- Definition

Amount of lessee's undiscounted obligation for lease payments in excess of discounted obligation for lease payments for finance lease.

+ References

+ Details

Name:	us-gaap_FinanceLeaseLiabilityUndiscountedExcessAmount
Namespace Prefix:	us-gaap_
Data Type:	xbrli:monetaryItemType
Balance Type:	credit
Period Type:	instant

- Definition

Weighted average discount rate for finance lease calculated at point in time.

+ References

Reference 1: http://www.xbrl.org/2003/role/exampleRef
-Topic 842
-SubTopic 20
-Name Accounting Standards Codification
-Section 55
-Paragraph 53
-Publisher FASB
-URI https://asc.fasb.org//1943274/2147479589/842-20-55-53

Reference 2: http://www.xbrl.org/2003/role/disclosureRef
-Topic 842
-SubTopic 20
-Name Accounting Standards Codification
-Section 50
-Paragraph 4
-Subparagraph (g)(4)
-Publisher FASB
-URI https://asc.fasb.org//1943274/2147478964/842-20-50-4

+ Details

Name:	us-gaap_FinanceLeaseWeightedAverageDiscountRatePercent
Namespace Prefix:	us-gaap_
Data Type:	dtr-types:percentItemType
Balance Type:	na
Period Type:	instant

- Definition

Weighted average remaining lease term for finance lease, in 'PnYnMnDTnHnMnS' format, for example, 'P1Y5M13D' represents reported fact of one year, five months, and thirteen days.

+ References

Reference 1: http://www.xbrl.org/2003/role/exampleRef
-Topic 842
-SubTopic 20
-Name Accounting Standards Codification
-Section 55
-Paragraph 53
-Publisher FASB
-URI https://asc.fasb.org//1943274/2147479589/842-20-55-53

Reference 2: http://www.xbrl.org/2003/role/disclosureRef
-Topic 842
-SubTopic 20
-Name Accounting Standards Codification
-Section 50
-Paragraph 4
-Subparagraph (g)(3)
-Publisher FASB
-URI https://asc.fasb.org//1943274/2147478964/842-20-50-4

+ Details

Name:	us-gaap_FinanceLeaseWeightedAverageRemainingLeaseTerm1
Namespace Prefix:	us-gaap_
Data Type:	xbrli:durationItemType
Balance Type:	na
Period Type:	instant

- Definition

Term of lessee's finance lease, in 'PnYnMnDTnHnMnS' format, for example, 'P1Y5M13D' represents reported fact of one year, five months, and thirteen days.

+ References

Reference 1: http://www.xbrl.org/2009/role/commonPracticeRef
-Topic 842
-SubTopic 20
-Name Accounting Standards Codification
-Section 50
-Paragraph 3
-Subparagraph (a)(3)
-Publisher FASB
-URI https://asc.fasb.org//1943274/2147478964/842-20-50-3

+ Details

Name:	us-gaap_LesseeFinanceLeaseTermOfContract1
Namespace Prefix:	us-gaap_
Data Type:	xbrli:durationItemType
Balance Type:	na
Period Type:	instant

- Definition

Amount of lessee's undiscounted obligation for lease payment for operating lease.

+ References

+ Details

Name:	us-gaap_LesseeOperatingLeaseLiabilityPaymentsDue
Namespace Prefix:	us-gaap_
Data Type:	xbrli:monetaryItemType
Balance Type:	credit
Period Type:	instant

- Definition

Amount of lessee's undiscounted obligation for lease payment for operating lease to be paid in next fiscal year following current fiscal year. Excludes interim and annual periods when interim periods are reported from current statement of financial position date (rolling approach).

+ References

+ Details

Name:	us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueNextTwelveMonths
Namespace Prefix:	us-gaap_
Data Type:	xbrli:monetaryItemType
Balance Type:	credit
Period Type:	instant

- Definition

Amount of lessee's undiscounted obligation for lease payment for operating lease to be paid in fourth fiscal year following current fiscal year. Excludes interim and annual periods when interim periods are reported from current statement of financial position date (rolling approach).

+ References

+ Details

Name:	us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueYearFour
Namespace Prefix:	us-gaap_
Data Type:	xbrli:monetaryItemType
Balance Type:	credit
Period Type:	instant

- Definition

Amount of lessee's undiscounted obligation for lease payment for operating lease to be paid in third fiscal year following current fiscal year. Excludes interim and annual periods when interim periods are reported from current statement of financial position date (rolling approach).

+ References

+ Details

Name:	us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueYearThree
Namespace Prefix:	us-gaap_
Data Type:	xbrli:monetaryItemType
Balance Type:	credit
Period Type:	instant

- Definition

Amount of lessee's undiscounted obligation for lease payment for operating lease to be paid in second fiscal year following current fiscal year. Excludes interim and annual periods when interim periods are reported from current statement of financial position date (rolling approach).

+ References

+ Details

Name:	us-gaap_LesseeOperatingLeaseLiabilityPaymentsDueYearTwo
Namespace Prefix:	us-gaap_
Data Type:	xbrli:monetaryItemType
Balance Type:	credit
Period Type:	instant

- Definition

Amount of lessee's undiscounted obligation for lease payment for operating lease having initial or remaining lease term in excess of one year to be paid in remainder of current fiscal year.

+ References

+ Details

Name:	us-gaap_LesseeOperatingLeaseLiabilityPaymentsRemainderOfFiscalYear
Namespace Prefix:	us-gaap_
Data Type:	xbrli:monetaryItemType
Balance Type:	credit
Period Type:	instant

- Definition

Amount of lessee's undiscounted obligation for lease payments in excess of discounted obligation for lease payments for operating lease.

+ References

+ Details

Name:	us-gaap_LesseeOperatingLeaseLiabilityUndiscountedExcessAmount
Namespace Prefix:	us-gaap_
Data Type:	xbrli:monetaryItemType
Balance Type:	credit
Period Type:	instant

- Definition

Term of lessee's operating lease, in 'PnYnMnDTnHnMnS' format, for example, 'P1Y5M13D' represents reported fact of one year, five months, and thirteen days.

+ References

+ Details

Name:	us-gaap_LesseeOperatingLeaseTermOfContract
Namespace Prefix:	us-gaap_
Data Type:	xbrli:durationItemType
Balance Type:	na
Period Type:	instant

- References

No definition available.

+ Details

Name:	us-gaap_OperatingLeaseLiabilitiesPaymentsDueAbstract
Namespace Prefix:	us-gaap_
Data Type:	xbrli:stringItemType
Balance Type:	na
Period Type:	duration

- Definition

Present value of lessee's discounted obligation for lease payments from operating lease.

+ References

Reference 1: http://www.xbrl.org/2003/role/disclosureRef
-Topic 842
-SubTopic 20
-Name Accounting Standards Codification
-Section 45
-Paragraph 1
-Subparagraph (b)
-Publisher FASB
-URI https://asc.fasb.org//1943274/2147479041/842-20-45-1

+ Details

Name:	us-gaap_OperatingLeaseLiability
Namespace Prefix:	us-gaap_
Data Type:	xbrli:monetaryItemType
Balance Type:	credit
Period Type:	instant

- Definition

Present value of lessee's discounted obligation for lease payments from operating lease, classified as noncurrent.

+ References

+ Details

Name:	us-gaap_OperatingLeaseLiabilityNoncurrent
Namespace Prefix:	us-gaap_
Data Type:	xbrli:monetaryItemType
Balance Type:	credit
Period Type:	instant

- Definition

Amount of lessee's right to use underlying asset under operating lease.

+ References

Reference 1: http://www.xbrl.org/2003/role/disclosureRef
-Topic 842
-SubTopic 20
-Name Accounting Standards Codification
-Section 45
-Paragraph 1
-Subparagraph (a)
-Publisher FASB
-URI https://asc.fasb.org//1943274/2147479041/842-20-45-1

+ Details

Name:	us-gaap_OperatingLeaseRightOfUseAsset
Namespace Prefix:	us-gaap_
Data Type:	xbrli:monetaryItemType
Balance Type:	debit
Period Type:	instant

- Definition

Weighted average discount rate for operating lease calculated at point in time.

+ References

+ Details

Name:	us-gaap_OperatingLeaseWeightedAverageDiscountRatePercent
Namespace Prefix:	us-gaap_
Data Type:	dtr-types:percentItemType
Balance Type:	na
Period Type:	instant

- Definition

Weighted average remaining lease term for operating lease, in 'PnYnMnDTnHnMnS' format, for example, 'P1Y5M13D' represents reported fact of one year, five months, and thirteen days.

+ References

Reference 1: http://www.xbrl.org/2003/role/exampleRef
-Topic 842
-SubTopic 20
-Name Accounting Standards Codification
-Section 55
-Paragraph 53
-Publisher FASB
-URI https://asc.fasb.org//1943274/2147479589/842-20-55-53

Reference 2: http://www.xbrl.org/2003/role/disclosureRef
-Topic 842
-SubTopic 20
-Name Accounting Standards Codification
-Section 50
-Paragraph 4
-Subparagraph (g)(3)
-Publisher FASB
-URI https://asc.fasb.org//1943274/2147478964/842-20-50-4

+ Details

Name:	us-gaap_OperatingLeaseWeightedAverageRemainingLeaseTerm1
Namespace Prefix:	us-gaap_
Data Type:	xbrli:durationItemType
Balance Type:	na
Period Type:	instant

- Definition

Amount of asset related to consideration paid in advance for rent that provides economic benefits within a future period of one year or the normal operating cycle, if longer.

+ References

Reference 1: http://www.xbrl.org/2003/role/exampleRef
-Topic 210
-SubTopic 10
-Name Accounting Standards Codification
-Section 45
-Paragraph 1
-Subparagraph (g)(3)
-Publisher FASB
-URI https://asc.fasb.org//1943274/2147483467/210-10-45-1

Reference 2: http://www.xbrl.org/2009/role/commonPracticeRef
-Topic 340
-SubTopic 10
-Name Accounting Standards Codification
-Section 45
-Paragraph 1
-Publisher FASB
-URI https://asc.fasb.org//1943274/2147483032/340-10-45-1

Reference 3: http://www.xbrl.org/2003/role/exampleRef
-Topic 340
-SubTopic 10
-Name Accounting Standards Codification
-Section 05
-Paragraph 5
-Subparagraph (c)
-Publisher FASB
-URI https://asc.fasb.org//1943274/2147482955/340-10-05-5

+ Details

Name:	us-gaap_PrepaidRent
Namespace Prefix:	us-gaap_
Data Type:	xbrli:monetaryItemType
Balance Type:	debit
Period Type:	instant

- Details

Name:	srt_CounterpartyNameAxis=acls_BeverlyPropertyOwnerLlcMember
Namespace Prefix:
Data Type:	na
Balance Type:
Period Type:

- Details

Name:	srt_RangeAxis=srt_MinimumMember
Namespace Prefix:
Data Type:	na
Balance Type:
Period Type:

- Details

Name:	srt_RangeAxis=srt_MaximumMember
Namespace Prefix:
Data Type:	na
Balance Type:
Period Type: