Business Segment and Geographic Region Information - Revenue by Product Line (Details) - USD ($) $ in Thousands	12 Months Ended
	Dec. 31, 2023	Dec. 31, 2022	Dec. 31, 2021
Revenue by product lines
Total revenue	$ 1,130,604	$ 919,998	$ 662,428
Ion implantation systems and services
Revenue by product lines
Total revenue	1,111,278	898,132	645,504
Other systems and services
Revenue by product lines
Total revenue	$ 19,326	$ 21,866	$ 16,924