Revenue (Details) - USD ($) $ in Thousands	12 Months Ended
	Dec. 31, 2023	Dec. 31, 2022	Dec. 31, 2021	Dec. 31, 2020
Disaggregation of Revenue
Deferred revenue	$ 210,885	$ 154,777	$ 68,436	$ 23,058
Short-term deferred revenue	164,677	123,471
Long-term deferred revenue	$ 46,208	$ 31,306
Maximum
Disaggregation of Revenue
Unsatisfied extended warranty performance obligations, period	24 months
Systems
Disaggregation of Revenue
Payment upon shipment of the system, as a percent	90.00%
Payment upon acceptance, as a percent	10.00%
Aftermarket | Minimum
Disaggregation of Revenue
Payment upon delivery of parts, period	30 days
Aftermarket | Maximum
Disaggregation of Revenue
Payment upon delivery of parts, period	60 days