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Inventories, net (Details) - USD ($)
$ in Thousands
Sep. 30, 2023
Dec. 31, 2022
Inventories, net    
Raw materials $ 226,601 $ 187,313
Work in process 55,825 35,069
Finished goods (completed systems) 29,797 20,024
Inventories, net $ 312,223 $ 242,406