Revenue (Details)	9 Months Ended
	Sep. 30, 2023
Systems
Disaggregation of Revenue
Payment upon shipment of the system, as a percent	90.00%
Payment upon acceptance, as a percent	10.00%
Systems | Minimum
Disaggregation of Revenue
Payment upon shipment of the system, as a percent	30.00%
Pre-shipment deposit, as a percent	20.00%
Systems | Maximum
Disaggregation of Revenue
Payment upon shipment of the system, as a percent	70.00%
Pre-shipment deposit, as a percent	60.00%
Aftermarket | Minimum
Disaggregation of Revenue
Payment upon delivery of parts, period	30 days
Aftermarket | Maximum
Disaggregation of Revenue
Payment upon delivery of parts, period	60 days