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Inventories, net (Tables)
6 Months Ended
Jun. 30, 2023
Inventories, net  
Schedule of components of inventories

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June 30,

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December 31,

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2023

    

2022

    

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(in thousands)

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Raw materials

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$

213,535

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$

187,313

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Work in process

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53,693

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35,069

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Finished goods (completed systems)

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32,613

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20,024

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Inventories, net

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$

299,841

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$

242,406

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