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Inventories, net (Details) - USD ($)
$ in Thousands
Mar. 31, 2023
Dec. 31, 2022
Inventories, net    
Raw materials $ 196,187 $ 187,313
Work in process 45,783 35,069
Finished goods (completed systems) 20,084 20,024
Inventories, net $ 262,054 $ 242,406