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Inventories, net (Tables)
3 Months Ended
Mar. 31, 2023
Inventories, net  
Schedule of components of inventories

March 31,

December 31,

    

2023

    

2022

    

(in thousands)

Raw materials

$

196,187

$

187,313

Work in process

 

45,783

 

35,069

Finished goods (completed systems)

 

20,084

 

20,024

Inventories, net

$

262,054

$

242,406