Business Segment and Geographic Region Information - Revenue by Product Line (Details) - USD ($) $ in Thousands	12 Months Ended
	Dec. 31, 2022	Dec. 31, 2021	Dec. 31, 2020
Revenue by product lines
Total revenue	$ 919,998	$ 662,428	$ 474,560
Ion implantation systems and services
Revenue by product lines
Total revenue	898,132	645,504	456,788
Other systems and services
Revenue by product lines
Total revenue	$ 21,866	$ 16,924	$ 17,772