Name:	acls_DefinedContributionPlanLineItems
Namespace Prefix:	acls_
Data Type:	xbrli:stringItemType
Balance Type:	na
Period Type:	duration

Amount of cost for defined contribution plan.

Reference 1: http://www.xbrl.org/2003/role/disclosureRef
-Publisher FASB
-Name Accounting Standards Codification
-Topic 715
-SubTopic 70
-Section 50
-Paragraph 1
-URI https://asc.fasb.org/extlink&oid=49170846&loc=d3e28014-114942

Name:	us-gaap_DefinedContributionPlanCostRecognized
Namespace Prefix:	us-gaap_
Data Type:	xbrli:monetaryItemType
Balance Type:	debit
Period Type:	duration

Percentage of employees' gross pay for which the employer contributes a matching contribution to a defined contribution plan.

No definition available.

Name:	us-gaap_DefinedContributionPlanEmployerMatchingContributionPercent
Namespace Prefix:	us-gaap_
Data Type:	dtr-types:percentItemType
Balance Type:	na
Period Type:	duration

Percentage employer matches of the employee's percentage contribution matched.

No definition available.

Name:	us-gaap_DefinedContributionPlanEmployerMatchingContributionPercentOfMatch
Namespace Prefix:	us-gaap_
Data Type:	dtr-types:percentItemType
Balance Type:	na
Period Type:	duration

Maximum percentage of employee gross pay the employee may contribute to a defined contribution plan.

No definition available.